JPH0472324U - - Google Patents
Info
- Publication number
- JPH0472324U JPH0472324U JP11495790U JP11495790U JPH0472324U JP H0472324 U JPH0472324 U JP H0472324U JP 11495790 U JP11495790 U JP 11495790U JP 11495790 U JP11495790 U JP 11495790U JP H0472324 U JPH0472324 U JP H0472324U
- Authority
- JP
- Japan
- Prior art keywords
- film
- optical disk
- disk substrate
- mask
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 5
- 230000003287 optical effect Effects 0.000 claims 4
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000009423 ventilation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000007872 degassing Methods 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11495790U JP2512630Y2 (ja) | 1990-10-31 | 1990-10-31 | 成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11495790U JP2512630Y2 (ja) | 1990-10-31 | 1990-10-31 | 成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0472324U true JPH0472324U (pt) | 1992-06-25 |
| JP2512630Y2 JP2512630Y2 (ja) | 1996-10-02 |
Family
ID=31862681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11495790U Expired - Fee Related JP2512630Y2 (ja) | 1990-10-31 | 1990-10-31 | 成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2512630Y2 (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022209587A1 (ja) * | 2021-03-31 | 2022-10-06 | ソニーグループ株式会社 | 多層光記録媒体用のスパッタリング装置および多層光記録媒体の製造方法 |
-
1990
- 1990-10-31 JP JP11495790U patent/JP2512630Y2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022209587A1 (ja) * | 2021-03-31 | 2022-10-06 | ソニーグループ株式会社 | 多層光記録媒体用のスパッタリング装置および多層光記録媒体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2512630Y2 (ja) | 1996-10-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |