JPH0471802U - - Google Patents

Info

Publication number
JPH0471802U
JPH0471802U JP11380890U JP11380890U JPH0471802U JP H0471802 U JPH0471802 U JP H0471802U JP 11380890 U JP11380890 U JP 11380890U JP 11380890 U JP11380890 U JP 11380890U JP H0471802 U JPH0471802 U JP H0471802U
Authority
JP
Japan
Prior art keywords
diaphragm
partition plate
negative pressure
pressure chamber
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11380890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11380890U priority Critical patent/JPH0471802U/ja
Publication of JPH0471802U publication Critical patent/JPH0471802U/ja
Pending legal-status Critical Current

Links

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  • Actuator (AREA)
JP11380890U 1990-10-29 1990-10-29 Pending JPH0471802U (esLanguage)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11380890U JPH0471802U (esLanguage) 1990-10-29 1990-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11380890U JPH0471802U (esLanguage) 1990-10-29 1990-10-29

Publications (1)

Publication Number Publication Date
JPH0471802U true JPH0471802U (esLanguage) 1992-06-25

Family

ID=31861424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11380890U Pending JPH0471802U (esLanguage) 1990-10-29 1990-10-29

Country Status (1)

Country Link
JP (1) JPH0471802U (esLanguage)

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