JPH0471779U - - Google Patents
Info
- Publication number
- JPH0471779U JPH0471779U JP11604490U JP11604490U JPH0471779U JP H0471779 U JPH0471779 U JP H0471779U JP 11604490 U JP11604490 U JP 11604490U JP 11604490 U JP11604490 U JP 11604490U JP H0471779 U JPH0471779 U JP H0471779U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- diffusion pump
- oil diffusion
- oil
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11604490U JPH051662Y2 (https=) | 1990-11-05 | 1990-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11604490U JPH051662Y2 (https=) | 1990-11-05 | 1990-11-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0471779U true JPH0471779U (https=) | 1992-06-25 |
| JPH051662Y2 JPH051662Y2 (https=) | 1993-01-18 |
Family
ID=31863860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11604490U Expired - Lifetime JPH051662Y2 (https=) | 1990-11-05 | 1990-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH051662Y2 (https=) |
-
1990
- 1990-11-05 JP JP11604490U patent/JPH051662Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH051662Y2 (https=) | 1993-01-18 |
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