JPH0470127U - - Google Patents
Info
- Publication number
- JPH0470127U JPH0470127U JP11069690U JP11069690U JPH0470127U JP H0470127 U JPH0470127 U JP H0470127U JP 11069690 U JP11069690 U JP 11069690U JP 11069690 U JP11069690 U JP 11069690U JP H0470127 U JPH0470127 U JP H0470127U
- Authority
- JP
- Japan
- Prior art keywords
- catalyst
- impurities
- purifier
- types
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003054 catalyst Substances 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims 6
- 238000006555 catalytic reaction Methods 0.000 claims 2
- 238000000746 purification Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第1図は本考案の一実施例の全体の系統図であ
る。
3……第1精製器、4……第1触媒、6……第
2精製器、7……第2触媒、8……電気ヒータ、
10……除塵用フイルタ。
FIG. 1 is an overall system diagram of an embodiment of the present invention. 3...First purifier, 4...First catalyst, 6...Second purifier, 7...Second catalyst, 8...Electric heater,
10...Dust removal filter.
Claims (1)
純物を除去する第1触媒を用いる第1精製器と、 第1精製器の下流側に設けられ、加熱されて触
媒反応をして、第1精製器からのガス中の不純物
を除去する第2触媒を用いる第2精製器とを含み
、 第2触媒は、第1触媒によつて除去される種類
の不純物の少なくとも一部分と、第1触媒によつ
て除去することができない種類の不純物とを、除
去することができ、しかも、不純物の除去可能な
総量は、除去可能な不純物の種類に拘らずぼ一定
である特性を有することを特徴とする精製装置。[Claims for Utility Model Registration] A first purifier using a first catalyst that performs a catalytic reaction at room temperature to remove impurities in the gas to be purified; a second purifier that uses a second catalyst to perform a catalytic reaction to remove impurities in the gas from the first purifier, the second catalyst removing impurities of the type removed by the first catalyst. and the types of impurities that cannot be removed by the first catalyst, and the total amount of impurities that can be removed is approximately constant regardless of the types of impurities that can be removed. A purification device characterized by having certain characteristics.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11069690U JP2501080Y2 (en) | 1990-10-22 | 1990-10-22 | Argon gas purification equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11069690U JP2501080Y2 (en) | 1990-10-22 | 1990-10-22 | Argon gas purification equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0470127U true JPH0470127U (en) | 1992-06-22 |
JP2501080Y2 JP2501080Y2 (en) | 1996-06-12 |
Family
ID=31858075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11069690U Expired - Lifetime JP2501080Y2 (en) | 1990-10-22 | 1990-10-22 | Argon gas purification equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2501080Y2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4800480A (en) * | 1987-10-30 | 1989-01-24 | Allied-Signal Inc. | Voltage doubler and system therefor |
-
1990
- 1990-10-22 JP JP11069690U patent/JP2501080Y2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2501080Y2 (en) | 1996-06-12 |
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