JPH0469585B2 - - Google Patents

Info

Publication number

JPH0469585B2

JPH0469585B2 JP62045614A JP4561487A JPH0469585B2 JP H0469585 B2 JPH0469585 B2 JP H0469585B2 JP 62045614 A JP62045614 A JP 62045614A JP 4561487 A JP4561487 A JP 4561487A JP H0469585 B2 JPH0469585 B2 JP H0469585B2

Authority

JP

Japan

Prior art keywords

resistor

weight

glass

alkaline earth

earth metal

Prior art date

1987-02-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• 239000000463 material Substances 0.000 claims description 86
• 239000011521 glass Substances 0.000 claims description 47
• MEFBJEMVZONFCJ-UHFFFAOYSA-N molybdate Chemical compound [O-][Mo]([O-])(=O)=O MEFBJEMVZONFCJ-UHFFFAOYSA-N 0.000 claims description 35
• PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 30
• 229910052748 manganese Inorganic materials 0.000 claims description 30
• 239000011572 manganese Substances 0.000 claims description 30
• 229910001618 alkaline earth metal fluoride Inorganic materials 0.000 claims description 23
• 238000010438 heat treatment Methods 0.000 claims description 11
• 239000002243 precursor Substances 0.000 claims description 10
• 238000004519 manufacturing process Methods 0.000 claims description 7
• 238000000034 method Methods 0.000 claims description 6
• 239000000919 ceramic Substances 0.000 description 38
• 239000004020 conductor Substances 0.000 description 30
• 239000000843 powder Substances 0.000 description 21
• 239000000758 substrate Substances 0.000 description 19
• 239000011248 coating agent Substances 0.000 description 17
• 238000000576 coating method Methods 0.000 description 17
• 239000000203 mixture Substances 0.000 description 17
• 238000010304 firing Methods 0.000 description 16
• ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 12
• 229910016006 MoSi Inorganic materials 0.000 description 11
• BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 11
• 239000000292 calcium oxide Substances 0.000 description 11
• 239000007789 gas Substances 0.000 description 10
• 230000001590 oxidative effect Effects 0.000 description 10
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
• LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
• 239000010953 base metal Substances 0.000 description 7
• 229920005989 resin Polymers 0.000 description 7
• 239000011347 resin Substances 0.000 description 7
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
• 239000010949 copper Substances 0.000 description 6
• 229910001873 dinitrogen Inorganic materials 0.000 description 6
• 229910052709 silver Inorganic materials 0.000 description 6
• KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 5
• 229910004298 SiO 2 Inorganic materials 0.000 description 5
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
• 229910052739 hydrogen Inorganic materials 0.000 description 5
• 239000005416 organic matter Substances 0.000 description 5
• 239000003960 organic solvent Substances 0.000 description 5
• OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 4
• VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 4
• 239000001856 Ethyl cellulose Substances 0.000 description 4
• ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 4
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
• 238000002441 X-ray diffraction Methods 0.000 description 4
• 229910052784 alkaline earth metal Inorganic materials 0.000 description 4
• 230000000052 comparative effect Effects 0.000 description 4
• 229910052802 copper Inorganic materials 0.000 description 4
• JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 4
• FLKPEMZONWLCSK-UHFFFAOYSA-N diethyl phthalate Chemical compound CCOC(=O)C1=CC=CC=C1C(=O)OCC FLKPEMZONWLCSK-UHFFFAOYSA-N 0.000 description 4
• 235000019325 ethyl cellulose Nutrition 0.000 description 4
• 229920001249 ethyl cellulose Polymers 0.000 description 4
• 239000001257 hydrogen Substances 0.000 description 4
• AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 4
• 239000000395 magnesium oxide Substances 0.000 description 4
• CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
• AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 4
• 229910052751 metal Inorganic materials 0.000 description 4
• 239000002184 metal Substances 0.000 description 4
• 229910001512 metal fluoride Inorganic materials 0.000 description 4
• 238000002156 mixing Methods 0.000 description 4
• 229910000510 noble metal Inorganic materials 0.000 description 4
• WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 4
• ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
• KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
• 150000001342 alkaline earth metals Chemical class 0.000 description 3
• 229910052810 boron oxide Inorganic materials 0.000 description 3
• 238000010586 diagram Methods 0.000 description 3
• 229910052759 nickel Inorganic materials 0.000 description 3
• 238000007650 screen-printing Methods 0.000 description 3
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
• CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
• 229910016036 BaF 2 Inorganic materials 0.000 description 2
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
• PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
• KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
• 229910000019 calcium carbonate Inorganic materials 0.000 description 2
• 229910052681 coesite Inorganic materials 0.000 description 2
• 229910052906 cristobalite Inorganic materials 0.000 description 2
• 238000000354 decomposition reaction Methods 0.000 description 2
• 239000002270 dispersing agent Substances 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 150000002431 hydrogen Chemical class 0.000 description 2
• 239000011261 inert gas Substances 0.000 description 2
• 239000000155 melt Substances 0.000 description 2
• 230000003647 oxidation Effects 0.000 description 2
• 238000007254 oxidation reaction Methods 0.000 description 2
• 239000002245 particle Substances 0.000 description 2
• 239000004014 plasticizer Substances 0.000 description 2
• 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
• 229910052573 porcelain Inorganic materials 0.000 description 2
• 238000010298 pulverizing process Methods 0.000 description 2
• 238000006722 reduction reaction Methods 0.000 description 2
• 239000000377 silicon dioxide Substances 0.000 description 2
• 235000012239 silicon dioxide Nutrition 0.000 description 2
• 239000002002 slurry Substances 0.000 description 2
• 229910052682 stishovite Inorganic materials 0.000 description 2
• IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Inorganic materials [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 2
• 229910052905 tridymite Inorganic materials 0.000 description 2
• XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
• WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
• VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
• LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
• QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
• 239000004925 Acrylic resin Substances 0.000 description 1
• 229920000178 Acrylic resin Polymers 0.000 description 1
• 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 1
• 239000001293 FEMA 3089 Substances 0.000 description 1
• 239000000020 Nitrocellulose Substances 0.000 description 1
• 239000005642 Oleic acid Substances 0.000 description 1
• ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 1
• 229910006404 SnO 2 Inorganic materials 0.000 description 1
• NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
• 239000000654 additive Substances 0.000 description 1
• 229910052786 argon Inorganic materials 0.000 description 1
• 229910052788 barium Inorganic materials 0.000 description 1
• 239000011230 binding agent Substances 0.000 description 1
• 239000004327 boric acid Substances 0.000 description 1
• 229910052796 boron Inorganic materials 0.000 description 1
• CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 description 1
• 229910052791 calcium Inorganic materials 0.000 description 1
• 239000011575 calcium Substances 0.000 description 1
• WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
• 229910001634 calcium fluoride Inorganic materials 0.000 description 1
• 239000003990 capacitor Substances 0.000 description 1
• 150000001734 carboxylic acid salts Chemical class 0.000 description 1
• 229920002678 cellulose Polymers 0.000 description 1
• 239000001913 cellulose Substances 0.000 description 1
• 238000010344 co-firing Methods 0.000 description 1
• 238000002485 combustion reaction Methods 0.000 description 1
• 150000001875 compounds Chemical class 0.000 description 1
• 239000000470 constituent Substances 0.000 description 1
• 230000008602 contraction Effects 0.000 description 1
• 230000007423 decrease Effects 0.000 description 1
• 238000007606 doctor blade method Methods 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 150000002222 fluorine compounds Chemical class 0.000 description 1
• 235000011187 glycerol Nutrition 0.000 description 1
• QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
• 239000007788 liquid Substances 0.000 description 1
• 229910052749 magnesium Inorganic materials 0.000 description 1
• 239000011777 magnesium Substances 0.000 description 1
• WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
• 238000002844 melting Methods 0.000 description 1
• 230000008018 melting Effects 0.000 description 1
• 150000002739 metals Chemical class 0.000 description 1
• 229910000476 molybdenum oxide Inorganic materials 0.000 description 1
• JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 1
• 230000007935 neutral effect Effects 0.000 description 1
• 229920001220 nitrocellulos Polymers 0.000 description 1
• ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
• TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
• PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
• 238000004806 packaging method and process Methods 0.000 description 1
• 238000007639 printing Methods 0.000 description 1
• 239000002994 raw material Substances 0.000 description 1
• 150000003839 salts Chemical class 0.000 description 1
• 229910052814 silicon oxide Inorganic materials 0.000 description 1
• 238000005245 sintering Methods 0.000 description 1
• 239000002904 solvent Substances 0.000 description 1
• 229910052712 strontium Inorganic materials 0.000 description 1
• 238000009966 trimming Methods 0.000 description 1
• 229910052725 zinc Inorganic materials 0.000 description 1