JPH0469464U - - Google Patents
Info
- Publication number
- JPH0469464U JPH0469464U JP11040990U JP11040990U JPH0469464U JP H0469464 U JPH0469464 U JP H0469464U JP 11040990 U JP11040990 U JP 11040990U JP 11040990 U JP11040990 U JP 11040990U JP H0469464 U JPH0469464 U JP H0469464U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding piece
- placement plate
- wafer holding
- holding position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11040990U JPH0469464U (de) | 1990-10-22 | 1990-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11040990U JPH0469464U (de) | 1990-10-22 | 1990-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0469464U true JPH0469464U (de) | 1992-06-19 |
Family
ID=31857744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11040990U Pending JPH0469464U (de) | 1990-10-22 | 1990-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0469464U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000343475A (ja) * | 1999-04-01 | 2000-12-12 | Applied Materials Inc | ウェーハハンドリングロボット用の空気圧作動式撓みグリッパ |
| KR101068704B1 (ko) * | 2008-01-24 | 2011-09-28 | 가부시키가이샤 야스카와덴키 | 기판 파지 장치 및 그것을 구비한 기판 반송 로봇, 반도체 제조 장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0243130A (ja) * | 1988-08-02 | 1990-02-13 | Toshiba Ceramics Co Ltd | 搬送装置 |
-
1990
- 1990-10-22 JP JP11040990U patent/JPH0469464U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0243130A (ja) * | 1988-08-02 | 1990-02-13 | Toshiba Ceramics Co Ltd | 搬送装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000343475A (ja) * | 1999-04-01 | 2000-12-12 | Applied Materials Inc | ウェーハハンドリングロボット用の空気圧作動式撓みグリッパ |
| KR101068704B1 (ko) * | 2008-01-24 | 2011-09-28 | 가부시키가이샤 야스카와덴키 | 기판 파지 장치 및 그것을 구비한 기판 반송 로봇, 반도체 제조 장치 |