JPH0469459U - - Google Patents

Info

Publication number
JPH0469459U
JPH0469459U JP11006390U JP11006390U JPH0469459U JP H0469459 U JPH0469459 U JP H0469459U JP 11006390 U JP11006390 U JP 11006390U JP 11006390 U JP11006390 U JP 11006390U JP H0469459 U JPH0469459 U JP H0469459U
Authority
JP
Japan
Prior art keywords
chamber
source
deposition chamber
film
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11006390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11006390U priority Critical patent/JPH0469459U/ja
Publication of JPH0469459U publication Critical patent/JPH0469459U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
  • Physical Vapour Deposition (AREA)
JP11006390U 1990-10-19 1990-10-19 Pending JPH0469459U (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11006390U JPH0469459U (pm) 1990-10-19 1990-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11006390U JPH0469459U (pm) 1990-10-19 1990-10-19

Publications (1)

Publication Number Publication Date
JPH0469459U true JPH0469459U (pm) 1992-06-19

Family

ID=31857344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11006390U Pending JPH0469459U (pm) 1990-10-19 1990-10-19

Country Status (1)

Country Link
JP (1) JPH0469459U (pm)

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JPH0469459U (pm)