JPH0468540U - - Google Patents
Info
- Publication number
- JPH0468540U JPH0468540U JP11245290U JP11245290U JPH0468540U JP H0468540 U JPH0468540 U JP H0468540U JP 11245290 U JP11245290 U JP 11245290U JP 11245290 U JP11245290 U JP 11245290U JP H0468540 U JPH0468540 U JP H0468540U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- columns
- loading jig
- wafer loading
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11245290U JPH0468540U (zh) | 1990-10-25 | 1990-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11245290U JPH0468540U (zh) | 1990-10-25 | 1990-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0468540U true JPH0468540U (zh) | 1992-06-17 |
Family
ID=31859953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11245290U Pending JPH0468540U (zh) | 1990-10-25 | 1990-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0468540U (zh) |
-
1990
- 1990-10-25 JP JP11245290U patent/JPH0468540U/ja active Pending