JPH0468538U - - Google Patents

Info

Publication number
JPH0468538U
JPH0468538U JP11229890U JP11229890U JPH0468538U JP H0468538 U JPH0468538 U JP H0468538U JP 11229890 U JP11229890 U JP 11229890U JP 11229890 U JP11229890 U JP 11229890U JP H0468538 U JPH0468538 U JP H0468538U
Authority
JP
Japan
Prior art keywords
wafer
transfer arm
wafer transfer
heat insulating
pin insertion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11229890U
Other languages
English (en)
Japanese (ja)
Other versions
JP2519577Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990112298U priority Critical patent/JP2519577Y2/ja
Publication of JPH0468538U publication Critical patent/JPH0468538U/ja
Application granted granted Critical
Publication of JP2519577Y2 publication Critical patent/JP2519577Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990112298U 1990-10-26 1990-10-26 ウエハー搬送アーム Expired - Lifetime JP2519577Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990112298U JP2519577Y2 (ja) 1990-10-26 1990-10-26 ウエハー搬送アーム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990112298U JP2519577Y2 (ja) 1990-10-26 1990-10-26 ウエハー搬送アーム

Publications (2)

Publication Number Publication Date
JPH0468538U true JPH0468538U (US06272168-20010807-M00014.png) 1992-06-17
JP2519577Y2 JP2519577Y2 (ja) 1996-12-04

Family

ID=31859796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990112298U Expired - Lifetime JP2519577Y2 (ja) 1990-10-26 1990-10-26 ウエハー搬送アーム

Country Status (1)

Country Link
JP (1) JP2519577Y2 (US06272168-20010807-M00014.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010253670A (ja) * 2009-03-31 2010-11-11 Sharp Corp 吸着装置及び搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010253670A (ja) * 2009-03-31 2010-11-11 Sharp Corp 吸着装置及び搬送装置

Also Published As

Publication number Publication date
JP2519577Y2 (ja) 1996-12-04

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