JPH0468520U - - Google Patents
Info
- Publication number
- JPH0468520U JPH0468520U JP11152990U JP11152990U JPH0468520U JP H0468520 U JPH0468520 U JP H0468520U JP 11152990 U JP11152990 U JP 11152990U JP 11152990 U JP11152990 U JP 11152990U JP H0468520 U JPH0468520 U JP H0468520U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- groove rods
- quartz
- wafers
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000010453 quartz Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 238000003466 welding Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11152990U JPH0468520U (nl) | 1990-10-24 | 1990-10-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11152990U JPH0468520U (nl) | 1990-10-24 | 1990-10-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0468520U true JPH0468520U (nl) | 1992-06-17 |
Family
ID=31858993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11152990U Pending JPH0468520U (nl) | 1990-10-24 | 1990-10-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0468520U (nl) |
-
1990
- 1990-10-24 JP JP11152990U patent/JPH0468520U/ja active Pending