JPH046735A - Exhaust device for magnetron - Google Patents

Abstract

PURPOSE:To remarkably simplify the exhaust process and completely automate it by providing a container connected to an exhaust pump system and mounted with multiple unexhausted magnetrons. CONSTITUTION:A metal container 11 mounted on an exhaust cart 10 forms an airtight envelope together with a removable container cover 12 and a heat- resistant O-ring 13, and multiple magnetrons 1 are arranged in a line in the perpendicular direction to the paper face in the airtight envelope. The skirt section 11a of the container 11 is communicated to an exhaust pump system. The intra-tube exhaust process for the multiple magnetrons 1 can be performed at once in vacuum, it is not necessary to individually connect the exhaust pipes of the magnetrons to a manifold, no carbide film is generated on the surface of anodes, and the treatment process to remove the film is not required.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an exhaust device for evacuating the inside of a tube to a vacuum in the manufacture of magnetrons, and in particular to an exhaust device for evacuating a plurality of magnetrons at once within one airtight envelope. The present invention relates to an exhaust system configured to perform treatment.

Prior Art■ In the exhaust process for manufacturing magnetrons, it is necessary to connect each magnetron to the exhaust pump system manifold at the tip of its exhaust pipe before exhausting. Tokuko Showa 5
Taking the evacuation method disclosed in Japanese Patent No. 9-36382 as an example, as shown in FIG. 3, the magnetron l before evacuation is
The enlarged tip of the metal exhaust pipe 2 is hermetically connected to the tip of the exhaust port 3 using a sleeve 4 and a nut 5. Then, the inside of the tube of the magnetron 1 is evacuated to a vacuum by the exhaust pump of the manifold 6flF connected to the exhaust port 3. At a stage when the exhaust treatment has progressed, a voltage is applied between the cathode terminals and also between the cathode and the anode to heat the magnetron to a high temperature. After the gas occluded in the electrodes is released, the exhaust pipe 2 is crimped and sealed at a predetermined position, and the remaining gas is removed.

Problems to be Solved by the Invention According to such conventional exhaust methods, the tip of the exhaust pipe is airtightly connected to the exhaust pump system manifold using a sleeve and a nut, or the tip of the exhaust pipe is enlarged. Moreover, the nut must be manually tightened and removed, making it difficult to achieve complete automation. Furthermore, since a carbonized film was formed on the surface of the copper anode of the magnetron when heated in the atmosphere, a treatment step was required to remove this film.

Means for Solving the Problems The exhaust device according to the present invention includes a container connected to an exhaust pump system and equipped with a plurality of pre-evacuation magnetrons, a container lid that is detachably placed on the container, and a container lid that is attached to the container lid. A plurality of pairs of rods hermetically penetrate through both side walls, and crimp sealing blades provided at each inner end of the rods to crimp and seal the metal exhaust pipe of the magnetron as the rods move. .

Effect With this configuration, tube exhaust treatment for multiple magnetrons can be performed at once in vacuum, eliminating the need to connect the exhaust pipes of each magnetron to the manifold individually. Since no carbonized film is generated during the process, a treatment step for removing the film is not required.

Embodiments Next, the present invention will be explained along with embodiments shown in the drawings.

Referring to FIG. 1, a metal container 11 mounted on an exhaust cart 10 includes a removable container M12 and a heat-resistant O
Together with the ring 13, it forms an airtight envelope, and within this airtight envelope, a plurality of carp magnetrons 1 are arranged in a line in a direction perpendicular to the plane of the paper. The bottom portion 11a of the container 11 communicates with an exhaust pump system (not shown).

Each eyelet ring 14 is airtightly fitted into a plurality of pairs of holes provided on both side walls of the container lid 12.
A rod 15 penetrates through this ring 14 so as to be freely retractable. A cylindrical bellows 16 provided between the ring 14 and the rod 15 is used to maintain airtightness between the three, and a coiled spring 17 is used to return the retracted rod I5. It is something. 1 pair of rods 15
Crimp sealing blades 18 are provided at each inner end of the rods 18 to face each other, and when a force F in the direction of the arrow is applied to the pair of rods 15 from the outside, the blades resist the spring pressure of the spring 17. The pair of crimp-sealing blades 18 that have moved forward crush the metal exhaust pipe 2 of the magnetron 1 from both sides and crimp-seal it. 19 indicates a ring-shaped cassette.

The anode 7 of the magnetron 1 is electrically connected to the metal container 11 through a metal plate spring 20, and is given an anode potential (ground potential). The pair of cathode terminals 8 of the magnetron 1 are connected to respective connection probes 21 . Q2 and the lead-in wire 23 lead to the lead-in terminal 25, which leads to the external lead wire 24. The introduction terminal 25 is connected to the insulating cylinder 2
6. It is airtightly fixed to the container 11 via a washer 27 and a cassette 28. 29 is the connecting probe 21°22
Indicates an insulating plate that is attached to electrically insulate the

As shown in FIG. 2, such an apparatus can simultaneously exhaust a plurality of magnetrons 1 arranged in one row. The exhaust system container on the left side of Figure 2! i12 is raised and retracted, and the container lid of the right exhaust device is mounted on the container. Such lifting/lowering and movement in the front/rear direction is carried out using the plate 30. This is done by a slide rail 31 and air cylinders 33,34. 32 indicates a pressurizing power machine for crimping and sealing.

Container 11 loaded with multiple magnetrons 1! 1
i12 is covered to form an airtight envelope, and the inside of the envelope is evacuated by driving a vacuum evacuation pump system. During this time, as usual, a predetermined voltage is applied between the pair of cathode terminals of each magnetron and between the cathode and the anode to heat the magnetron and release the gas occluded in the electrode material. When the pressurizing motor 32 is driven when the exhaust treatment is completed, the pair of rods 15 move forward and the metal exhaust pipe 2 of the magnetron 1 is crushed from three sides by the pair of crimp sealing blades 18.
Crimp sealing pressure is completed. After sealing, the crimp sealing blade 18 returns to its original position due to the spring pressure of the spring 17, and the container N12 is attached to the plate 30. It rises and retreats under the drive of the rail 31 and air cylinders 33,34.

Effects of the Invention As described above, according to the present invention, it is not necessary to connect the pre-exhaust magnetron to the manifold at its exhaust pipe portion, so the exhaust process can be significantly simplified and completely automated. .

Further, since no carbonized film is formed on the outer surface of the anode, there is an advantage that a process for removing the film is not required.

[Brief explanation of drawings]

Fig. 1 is a partially cutaway side view of the main parts of a magnetron exhaust system embodying the present invention, and Fig. 2 is a complete view of the same system.
Magnetron, 2... Exhaust pipe, 7...
Anode, 8...Cathode terminal, 10...Exhaust cart, 11...Container, 12...Container lid, 18...Crimp seal Stopping blade. Agent's name Patent attorney Shigetaka Awano 1 idiot Figure 2 ＼ ＼ l Makuneto mouth) 2 Wall trachea 10 Interesting cart 11 Audience 12... IE Nihon

Claims (1)

[Claims] A container connected to an exhaust pump system and equipped with a plurality of pre-evacuation magnetrons, a container lid that is detachably placed on the container, a plurality of pairs of rods that hermetically penetrate both side walls of the container lid, and 1. An exhaust device for a magnetron, comprising a crimp sealing blade provided at each inner end of a rod for crimp-sealing a metal exhaust pipe of the magnetron as the rod moves.