JPH0467330U - - Google Patents

Info

Publication number

JPH0467330U

JPH0467330U JP11062890U JP11062890U JPH0467330U JP H0467330 U JPH0467330 U JP H0467330U JP 11062890 U JP11062890 U JP 11062890U JP 11062890 U JP11062890 U JP 11062890U JP H0467330 U JPH0467330 U JP H0467330U

Authority

JP

Japan

Prior art keywords

parts

wiring

electrode parts

electrode

semiconductor

Prior art date

1990-10-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 6
• 239000000758 substrate Substances 0.000 claims description 3
• 239000000463 material Substances 0.000 claims 1
• WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 claims 1
• 229910021342 tungsten silicide Inorganic materials 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1