JPH0467328U - - Google Patents
Info
- Publication number
- JPH0467328U JPH0467328U JP10969190U JP10969190U JPH0467328U JP H0467328 U JPH0467328 U JP H0467328U JP 10969190 U JP10969190 U JP 10969190U JP 10969190 U JP10969190 U JP 10969190U JP H0467328 U JPH0467328 U JP H0467328U
- Authority
- JP
- Japan
- Prior art keywords
- furnace body
- receiving member
- quartz tube
- support mechanism
- inner periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000945 filler Substances 0.000 claims 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10969190U JP2535564Y2 (ja) | 1990-10-22 | 1990-10-22 | 縦型反応炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10969190U JP2535564Y2 (ja) | 1990-10-22 | 1990-10-22 | 縦型反応炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0467328U true JPH0467328U (hu) | 1992-06-15 |
| JP2535564Y2 JP2535564Y2 (ja) | 1997-05-14 |
Family
ID=31856931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10969190U Expired - Lifetime JP2535564Y2 (ja) | 1990-10-22 | 1990-10-22 | 縦型反応炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2535564Y2 (hu) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010027632A (ja) * | 2008-07-15 | 2010-02-04 | Shin Etsu Handotai Co Ltd | 縦型熱処理装置 |
-
1990
- 1990-10-22 JP JP10969190U patent/JP2535564Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010027632A (ja) * | 2008-07-15 | 2010-02-04 | Shin Etsu Handotai Co Ltd | 縦型熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2535564Y2 (ja) | 1997-05-14 |