JPH0467327U - - Google Patents
Info
- Publication number
- JPH0467327U JPH0467327U JP11135690U JP11135690U JPH0467327U JP H0467327 U JPH0467327 U JP H0467327U JP 11135690 U JP11135690 U JP 11135690U JP 11135690 U JP11135690 U JP 11135690U JP H0467327 U JPH0467327 U JP H0467327U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- monitoring device
- pressure monitoring
- exhaust pressure
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012806 monitoring device Methods 0.000 claims description 4
- 238000010926 purge Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11135690U JPH0467327U (ru) | 1990-10-23 | 1990-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11135690U JPH0467327U (ru) | 1990-10-23 | 1990-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0467327U true JPH0467327U (ru) | 1992-06-15 |
Family
ID=31858793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11135690U Pending JPH0467327U (ru) | 1990-10-23 | 1990-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0467327U (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012160614A (ja) * | 2011-02-01 | 2012-08-23 | Tokyo Electron Ltd | 成膜装置 |
-
1990
- 1990-10-23 JP JP11135690U patent/JPH0467327U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012160614A (ja) * | 2011-02-01 | 2012-08-23 | Tokyo Electron Ltd | 成膜装置 |
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