JPH0467326U - - Google Patents

Info

Publication number
JPH0467326U
JPH0467326U JP11081990U JP11081990U JPH0467326U JP H0467326 U JPH0467326 U JP H0467326U JP 11081990 U JP11081990 U JP 11081990U JP 11081990 U JP11081990 U JP 11081990U JP H0467326 U JPH0467326 U JP H0467326U
Authority
JP
Japan
Prior art keywords
gas ejection
gas
vapor phase
crystal growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11081990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11081990U priority Critical patent/JPH0467326U/ja
Publication of JPH0467326U publication Critical patent/JPH0467326U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11081990U 1990-10-22 1990-10-22 Pending JPH0467326U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11081990U JPH0467326U (zh) 1990-10-22 1990-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11081990U JPH0467326U (zh) 1990-10-22 1990-10-22

Publications (1)

Publication Number Publication Date
JPH0467326U true JPH0467326U (zh) 1992-06-15

Family

ID=31858212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11081990U Pending JPH0467326U (zh) 1990-10-22 1990-10-22

Country Status (1)

Country Link
JP (1) JPH0467326U (zh)

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