JPH0466580U - - Google Patents

Info

Publication number
JPH0466580U
JPH0466580U JP11045690U JP11045690U JPH0466580U JP H0466580 U JPH0466580 U JP H0466580U JP 11045690 U JP11045690 U JP 11045690U JP 11045690 U JP11045690 U JP 11045690U JP H0466580 U JPH0466580 U JP H0466580U
Authority
JP
Japan
Prior art keywords
strain gauge
metal substrate
cantilever
acceleration sensor
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11045690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11045690U priority Critical patent/JPH0466580U/ja
Publication of JPH0466580U publication Critical patent/JPH0466580U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP11045690U 1990-10-22 1990-10-22 Pending JPH0466580U (US06168776-20010102-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11045690U JPH0466580U (US06168776-20010102-C00041.png) 1990-10-22 1990-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11045690U JPH0466580U (US06168776-20010102-C00041.png) 1990-10-22 1990-10-22

Publications (1)

Publication Number Publication Date
JPH0466580U true JPH0466580U (US06168776-20010102-C00041.png) 1992-06-11

Family

ID=31857796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11045690U Pending JPH0466580U (US06168776-20010102-C00041.png) 1990-10-22 1990-10-22

Country Status (1)

Country Link
JP (1) JPH0466580U (US06168776-20010102-C00041.png)

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