JPH0465446U - - Google Patents

Info

Publication number
JPH0465446U
JPH0465446U JP10792690U JP10792690U JPH0465446U JP H0465446 U JPH0465446 U JP H0465446U JP 10792690 U JP10792690 U JP 10792690U JP 10792690 U JP10792690 U JP 10792690U JP H0465446 U JPH0465446 U JP H0465446U
Authority
JP
Japan
Prior art keywords
wafer
chuck
orientation flat
center
spin chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10792690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10792690U priority Critical patent/JPH0465446U/ja
Publication of JPH0465446U publication Critical patent/JPH0465446U/ja
Pending legal-status Critical Current

Links

JP10792690U 1990-10-17 1990-10-17 Pending JPH0465446U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10792690U JPH0465446U (US20030199744A1-20031023-C00003.png) 1990-10-17 1990-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10792690U JPH0465446U (US20030199744A1-20031023-C00003.png) 1990-10-17 1990-10-17

Publications (1)

Publication Number Publication Date
JPH0465446U true JPH0465446U (US20030199744A1-20031023-C00003.png) 1992-06-08

Family

ID=31854660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10792690U Pending JPH0465446U (US20030199744A1-20031023-C00003.png) 1990-10-17 1990-10-17

Country Status (1)

Country Link
JP (1) JPH0465446U (US20030199744A1-20031023-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015026793A (ja) * 2013-07-29 2015-02-05 住友電気工業株式会社 サセプタ及び製造装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02264421A (ja) * 1989-04-05 1990-10-29 Oki Electric Ind Co Ltd レジスト回転塗布装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02264421A (ja) * 1989-04-05 1990-10-29 Oki Electric Ind Co Ltd レジスト回転塗布装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015026793A (ja) * 2013-07-29 2015-02-05 住友電気工業株式会社 サセプタ及び製造装置

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