JPH04653U - - Google Patents
Info
- Publication number
- JPH04653U JPH04653U JP4004890U JP4004890U JPH04653U JP H04653 U JPH04653 U JP H04653U JP 4004890 U JP4004890 U JP 4004890U JP 4004890 U JP4004890 U JP 4004890U JP H04653 U JPH04653 U JP H04653U
- Authority
- JP
- Japan
- Prior art keywords
- liner
- gap
- length
- divided
- blocks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007935 neutral effect Effects 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4004890U JPH04653U (zh) | 1990-04-13 | 1990-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4004890U JPH04653U (zh) | 1990-04-13 | 1990-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04653U true JPH04653U (zh) | 1992-01-07 |
Family
ID=31549497
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4004890U Pending JPH04653U (zh) | 1990-04-13 | 1990-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04653U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11152565A (ja) * | 1997-09-08 | 1999-06-08 | Eaton Corp | イオン注入装置の電子シャワー、延長チューブ及びこのチューブの再生方法 |
-
1990
- 1990-04-13 JP JP4004890U patent/JPH04653U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11152565A (ja) * | 1997-09-08 | 1999-06-08 | Eaton Corp | イオン注入装置の電子シャワー、延長チューブ及びこのチューブの再生方法 |