JPH04652U - - Google Patents

Info

Publication number
JPH04652U
JPH04652U JP3473390U JP3473390U JPH04652U JP H04652 U JPH04652 U JP H04652U JP 3473390 U JP3473390 U JP 3473390U JP 3473390 U JP3473390 U JP 3473390U JP H04652 U JPH04652 U JP H04652U
Authority
JP
Japan
Prior art keywords
container
vacuum
wall material
inner container
holds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3473390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3473390U priority Critical patent/JPH04652U/ja
Publication of JPH04652U publication Critical patent/JPH04652U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
JP3473390U 1990-03-30 1990-03-30 Pending JPH04652U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3473390U JPH04652U (US06826419-20041130-M00005.png) 1990-03-30 1990-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3473390U JPH04652U (US06826419-20041130-M00005.png) 1990-03-30 1990-03-30

Publications (1)

Publication Number Publication Date
JPH04652U true JPH04652U (US06826419-20041130-M00005.png) 1992-01-07

Family

ID=31539466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3473390U Pending JPH04652U (US06826419-20041130-M00005.png) 1990-03-30 1990-03-30

Country Status (1)

Country Link
JP (1) JPH04652U (US06826419-20041130-M00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005069359A1 (ja) * 2004-01-13 2007-12-27 株式会社日立国際電気 基板処理装置および半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005069359A1 (ja) * 2004-01-13 2007-12-27 株式会社日立国際電気 基板処理装置および半導体装置の製造方法
JP4679369B2 (ja) * 2004-01-13 2011-04-27 株式会社日立国際電気 基板処理装置および半導体装置の製造方法

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