JPH0464596B2 - - Google Patents

Info

Publication number
JPH0464596B2
JPH0464596B2 JP9042387A JP9042387A JPH0464596B2 JP H0464596 B2 JPH0464596 B2 JP H0464596B2 JP 9042387 A JP9042387 A JP 9042387A JP 9042387 A JP9042387 A JP 9042387A JP H0464596 B2 JPH0464596 B2 JP H0464596B2
Authority
JP
Japan
Prior art keywords
diaphragm
piezoelectric element
elastic material
open end
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9042387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63255680A (ja
Inventor
Yoshinori Yamazaki
Seishiro Yamakawa
Michimasa Tsuzaki
Shoichi Oka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP9042387A priority Critical patent/JPS63255680A/ja
Publication of JPS63255680A publication Critical patent/JPS63255680A/ja
Publication of JPH0464596B2 publication Critical patent/JPH0464596B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP9042387A 1987-04-13 1987-04-13 超音波振動子 Granted JPS63255680A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9042387A JPS63255680A (ja) 1987-04-13 1987-04-13 超音波振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9042387A JPS63255680A (ja) 1987-04-13 1987-04-13 超音波振動子

Publications (2)

Publication Number Publication Date
JPS63255680A JPS63255680A (ja) 1988-10-21
JPH0464596B2 true JPH0464596B2 (US07321065-20080122-C00160.png) 1992-10-15

Family

ID=13998196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9042387A Granted JPS63255680A (ja) 1987-04-13 1987-04-13 超音波振動子

Country Status (1)

Country Link
JP (1) JPS63255680A (US07321065-20080122-C00160.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI456168B (zh) * 2012-02-21 2014-10-11 組裝模組、超聲波感測裝置及其製造方法
DE102015216200A1 (de) * 2015-08-25 2017-03-02 Robert Bosch Gmbh Akustischer Sensor mit einem Gehäuse und einem an diesem Gehäuse angeordneten Membranelement

Also Published As

Publication number Publication date
JPS63255680A (ja) 1988-10-21

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