JPH0464571U - - Google Patents
Info
- Publication number
- JPH0464571U JPH0464571U JP10544290U JP10544290U JPH0464571U JP H0464571 U JPH0464571 U JP H0464571U JP 10544290 U JP10544290 U JP 10544290U JP 10544290 U JP10544290 U JP 10544290U JP H0464571 U JPH0464571 U JP H0464571U
- Authority
- JP
- Japan
- Prior art keywords
- piping
- liquid nitrogen
- ultra
- high vacuum
- outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims 3
- 239000002994 raw material Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000012856 packing Methods 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10544290U JPH0464571U (online.php) | 1990-10-05 | 1990-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10544290U JPH0464571U (online.php) | 1990-10-05 | 1990-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0464571U true JPH0464571U (online.php) | 1992-06-03 |
Family
ID=31851126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10544290U Pending JPH0464571U (online.php) | 1990-10-05 | 1990-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0464571U (online.php) |
-
1990
- 1990-10-05 JP JP10544290U patent/JPH0464571U/ja active Pending