JPH0463552U - - Google Patents

Info

Publication number
JPH0463552U
JPH0463552U JP10756790U JP10756790U JPH0463552U JP H0463552 U JPH0463552 U JP H0463552U JP 10756790 U JP10756790 U JP 10756790U JP 10756790 U JP10756790 U JP 10756790U JP H0463552 U JPH0463552 U JP H0463552U
Authority
JP
Japan
Prior art keywords
oven
temperature
heating
power supply
power unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10756790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10756790U priority Critical patent/JPH0463552U/ja
Publication of JPH0463552U publication Critical patent/JPH0463552U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP10756790U 1990-10-11 1990-10-11 Pending JPH0463552U (US20100012521A1-20100121-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10756790U JPH0463552U (US20100012521A1-20100121-C00001.png) 1990-10-11 1990-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10756790U JPH0463552U (US20100012521A1-20100121-C00001.png) 1990-10-11 1990-10-11

Publications (1)

Publication Number Publication Date
JPH0463552U true JPH0463552U (US20100012521A1-20100121-C00001.png) 1992-05-29

Family

ID=31854154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10756790U Pending JPH0463552U (US20100012521A1-20100121-C00001.png) 1990-10-11 1990-10-11

Country Status (1)

Country Link
JP (1) JPH0463552U (US20100012521A1-20100121-C00001.png)

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