JPH0463120U - - Google Patents

Info

Publication number
JPH0463120U
JPH0463120U JP10505390U JP10505390U JPH0463120U JP H0463120 U JPH0463120 U JP H0463120U JP 10505390 U JP10505390 U JP 10505390U JP 10505390 U JP10505390 U JP 10505390U JP H0463120 U JPH0463120 U JP H0463120U
Authority
JP
Japan
Prior art keywords
heat treatment
pillars
treatment unit
exhausted
pillar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10505390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10505390U priority Critical patent/JPH0463120U/ja
Priority to US07/767,588 priority patent/US5201653A/en
Publication of JPH0463120U publication Critical patent/JPH0463120U/ja
Pending legal-status Critical Current

Links

JP10505390U 1990-10-02 1990-10-04 Pending JPH0463120U (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10505390U JPH0463120U (enrdf_load_stackoverflow) 1990-10-04 1990-10-04
US07/767,588 US5201653A (en) 1990-10-02 1991-09-30 Substrate heat-treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10505390U JPH0463120U (enrdf_load_stackoverflow) 1990-10-04 1990-10-04

Publications (1)

Publication Number Publication Date
JPH0463120U true JPH0463120U (enrdf_load_stackoverflow) 1992-05-29

Family

ID=31850592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10505390U Pending JPH0463120U (enrdf_load_stackoverflow) 1990-10-02 1990-10-04

Country Status (1)

Country Link
JP (1) JPH0463120U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196414A (ja) * 1989-01-25 1990-08-03 Fujitsu Ltd レジスト処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196414A (ja) * 1989-01-25 1990-08-03 Fujitsu Ltd レジスト処理装置

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