JPH0460550U - - Google Patents

Info

Publication number
JPH0460550U
JPH0460550U JP10240390U JP10240390U JPH0460550U JP H0460550 U JPH0460550 U JP H0460550U JP 10240390 U JP10240390 U JP 10240390U JP 10240390 U JP10240390 U JP 10240390U JP H0460550 U JPH0460550 U JP H0460550U
Authority
JP
Japan
Prior art keywords
opening
lid body
lid
vacuum chamber
vacuum device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10240390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10240390U priority Critical patent/JPH0460550U/ja
Publication of JPH0460550U publication Critical patent/JPH0460550U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
JP10240390U 1990-09-28 1990-09-28 Pending JPH0460550U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10240390U JPH0460550U (enrdf_load_stackoverflow) 1990-09-28 1990-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10240390U JPH0460550U (enrdf_load_stackoverflow) 1990-09-28 1990-09-28

Publications (1)

Publication Number Publication Date
JPH0460550U true JPH0460550U (enrdf_load_stackoverflow) 1992-05-25

Family

ID=31846630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10240390U Pending JPH0460550U (enrdf_load_stackoverflow) 1990-09-28 1990-09-28

Country Status (1)

Country Link
JP (1) JPH0460550U (enrdf_load_stackoverflow)

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