JPH0460546U - - Google Patents

Info

Publication number
JPH0460546U
JPH0460546U JP10240590U JP10240590U JPH0460546U JP H0460546 U JPH0460546 U JP H0460546U JP 10240590 U JP10240590 U JP 10240590U JP 10240590 U JP10240590 U JP 10240590U JP H0460546 U JPH0460546 U JP H0460546U
Authority
JP
Japan
Prior art keywords
window
rotating shaft
outside
plate
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10240590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10240590U priority Critical patent/JPH0460546U/ja
Publication of JPH0460546U publication Critical patent/JPH0460546U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10240590U 1990-09-28 1990-09-28 Pending JPH0460546U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10240590U JPH0460546U (enrdf_load_html_response) 1990-09-28 1990-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10240590U JPH0460546U (enrdf_load_html_response) 1990-09-28 1990-09-28

Publications (1)

Publication Number Publication Date
JPH0460546U true JPH0460546U (enrdf_load_html_response) 1992-05-25

Family

ID=31846634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10240590U Pending JPH0460546U (enrdf_load_html_response) 1990-09-28 1990-09-28

Country Status (1)

Country Link
JP (1) JPH0460546U (enrdf_load_html_response)

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