JPH0460539U - - Google Patents
Info
- Publication number
- JPH0460539U JPH0460539U JP10108090U JP10108090U JPH0460539U JP H0460539 U JPH0460539 U JP H0460539U JP 10108090 U JP10108090 U JP 10108090U JP 10108090 U JP10108090 U JP 10108090U JP H0460539 U JPH0460539 U JP H0460539U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- heating
- processing apparatus
- induction heating
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000006698 induction Effects 0.000 claims description 3
- 238000009832 plasma treatment Methods 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
- Tunnel Furnaces (AREA)
Description
第１図は本考案によるプラズマ処理装置の一実
施例を示す図、第２図は従来のプラズマ処理装置
によるプラズマ処理を概説するための図である。
１１……真空容器部、１２……薄鋼帯、１３…
…ガイドロール、１４……薄鋼帯供給室、１５ａ
……誘導加熱装置、１６……プラズマ処理室、１
７……冷却室、１８……薄鋼帯巻取室。
FIG. 1 is a diagram showing an embodiment of a plasma processing apparatus according to the present invention, and FIG. 2 is a diagram for outlining plasma processing by a conventional plasma processing apparatus. 11... Vacuum container part, 12... Thin steel strip, 13...
...Guide roll, 14...Thin steel strip supply chamber, 15a
...Induction heating device, 16...Plasma processing chamber, 1
7...Cooling room, 18...Thin steel strip winding room.
Claims (1)
処理を施す際に用いられるプラズマ処理装置であ
つて、前記材料を所定の温度に加熱して加熱材料
とする誘導加熱手段と、該加熱材料をプラズマ処
理するプラズマ処理手段とを有し、該プラズマ処
理手段の入側に前記誘導加熱手段を配設したこと
を特徴とするプラズマ処理装置。 A plasma processing apparatus used when subjecting a material moving in a predetermined direction to plasma treatment, the apparatus comprising: induction heating means for heating the material to a predetermined temperature to produce a heating material; and plasma processing for the heating material. 1. A plasma processing apparatus, comprising: a plasma processing means, the induction heating means being disposed on an inlet side of the plasma processing means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10108090U JPH0460539U (en) | 1990-09-28 | 1990-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10108090U JPH0460539U (en) | 1990-09-28 | 1990-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0460539U true JPH0460539U (en) | 1992-05-25 |
Family
ID=31844233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10108090U Pending JPH0460539U (en) | 1990-09-28 | 1990-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0460539U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021106439A1 (en) * | 2019-11-27 | 2021-06-03 | 株式会社神戸製鋼所 | Vacuum heat treatment device for foil base materials and heat treatment method for foil base materials |
-
1990
- 1990-09-28 JP JP10108090U patent/JPH0460539U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021106439A1 (en) * | 2019-11-27 | 2021-06-03 | 株式会社神戸製鋼所 | Vacuum heat treatment device for foil base materials and heat treatment method for foil base materials |
| JP2021085066A (en) * | 2019-11-27 | 2021-06-03 | 株式会社神戸製鋼所 | Vacuum heat treatment apparatus for foil base material and heat treatment method for foil base material |