JPH0460441A - Photoacoustic cell for absorption analysis measurement of liquid sample - Google Patents

Photoacoustic cell for absorption analysis measurement of liquid sample

Info

Publication number
JPH0460441A
JPH0460441A JP2172423A JP17242390A JPH0460441A JP H0460441 A JPH0460441 A JP H0460441A JP 2172423 A JP2172423 A JP 2172423A JP 17242390 A JP17242390 A JP 17242390A JP H0460441 A JPH0460441 A JP H0460441A
Authority
JP
Japan
Prior art keywords
measurement
liquid sample
light
sample liquid
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2172423A
Other languages
Japanese (ja)
Other versions
JPH087193B2 (en
Inventor
Yukito Tabuchi
田淵 幸人
Toshiyuki Matsunaka
敏行 松中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Aloka Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aloka Co Ltd filed Critical Aloka Co Ltd
Priority to JP2172423A priority Critical patent/JPH087193B2/en
Publication of JPH0460441A publication Critical patent/JPH0460441A/en
Publication of JPH087193B2 publication Critical patent/JPH087193B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To enable execution of acoustic-wave measurement being sensitive sufficiently to a modulated light for measurement modulated at a specific wavelength and sensitive to a sound pressure, by providing an acoustic-wave measuring piezoelectric body stuck on a cylindrical resonator into which a measuring tube is fitly inserted. CONSTITUTION:When a modulation signal is oscillated from a modulation signal generator 42, a laser diode driver 43 drives a laser diode 45 and a laser light is emitted from the diode 45. The laser light is applied to the position of the antinode of an acoustic wave in a photoacoustic cell 30 wherein a sample liquid 20 is stored. In this case, the sample liquid 20 generates a heat with absorption of the light, a periodic heat current is brought forth and thereby the sample liquid 20 is made to vibrate. With the vibration of the sample liquid 20, a resonator 38 resonates and a piezoelectric member 40 converts this vibration into an electric signal. Moreover, the electric signal is amplified by a preamplifier 47 and subjected to a prescribed signal processing 48 through a lock-in amplifier 44. This constitution enables execution of acoustic-wave measurement being sensitive sufficiently to a modulated light for measurement modulated at frequencies of several tens of KHz to several MHz and sensitive to sound pressure.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は、液状試料に測定用変調光を照射することによ
り液状試料の光吸収に伴う熱の発生によって発生する音
波を測定する液状試料吸光分析測定用光音響セルに関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Fields] The present invention is a method for measuring liquid sample absorption, which measures sound waves generated by the generation of heat accompanying light absorption of a liquid sample by irradiating the liquid sample with modulated light for measurement. This invention relates to a photoacoustic cell for analysis and measurement.

[従来の技術] 従来、液体や半流動体などの液状の試料に測定用変調光
を照射し、液状試料の光吸収に伴う熱の発生によって発
生する音波を測定して試料の分析を行う液状試料吸光分
析測定装置が知られている。
[Conventional technology] Conventionally, liquid samples such as liquids and semi-fluids are irradiated with modulated light for measurement, and the samples are analyzed by measuring the sound waves generated by the generation of heat accompanying light absorption in the liquid samples. Sample absorption analysis measurement devices are known.

そして、その音波の測定を行う光分析測定用光音響セル
10は、第3図に示すように、円筒状の管12の両端に
石英ガラス板13.14が取り付けられている。
As shown in FIG. 3, the photoacoustic cell 10 for optical analysis and measurement that measures the sound waves has quartz glass plates 13 and 14 attached to both ends of a cylindrical tube 12.

そして、石英ガラス板13と円筒状の管12との間、及
び石英ガラス板14と円筒状の管12との間には気密を
保持するためにOリング18,19が嵌入されており、
これらにより試料液20を貯留するだめの気密の試料箱
22が構成されている。
O-rings 18 and 19 are fitted between the quartz glass plate 13 and the cylindrical tube 12 and between the quartz glass plate 14 and the cylindrical tube 12 to maintain airtightness.
These constitute an airtight sample box 22 in which the sample liquid 20 is stored.

更に、円筒状の管12の上部に穿設された穴にはL字状
のバイブ24が接合されており、バイブ24の先端には
、主として10kHz以下の周波数に感度を有するマイ
クロホン26が配置されている。
Further, an L-shaped vibrator 24 is connected to a hole bored in the upper part of the cylindrical tube 12, and a microphone 26 that is mainly sensitive to frequencies below 10 kHz is arranged at the tip of the vibrator 24. ing.

また、測定用変調光は、例えば振幅変調されたレーザ光
が用いられ、その変調には1kHz以下で使用可能なメ
カニカルチョッパ等か用いられている。
Further, as the modulated light for measurement, for example, amplitude-modulated laser light is used, and a mechanical chopper or the like that can be used at a frequency of 1 kHz or less is used for modulation.

次に動作について説明する。Next, the operation will be explained.

試料箱22内に試料液20を封入し、試料箱22の外部
から変調光(例えばレーザ光)を石英ガラス板13を通
して試料液20に照射すると、試料液20はレーザ光を
吸収する。
A sample liquid 20 is sealed in a sample box 22, and when modulated light (for example, laser light) is irradiated onto the sample liquid 20 from outside the sample box 22 through the quartz glass plate 13, the sample liquid 20 absorbs the laser light.

この際、試料液20は光吸収に伴い熱を発生し、この熱
による周期的な熱流によって音波が発生する。
At this time, the sample liquid 20 generates heat as it absorbs light, and a periodic heat flow due to this heat generates a sound wave.

そして、この音波をマイクロホン26で採って測定する
ことにより試料液20の吸光量を測定し、この吸光量に
より試料液20の定性・定量分析が行われる。
Then, by collecting and measuring this sound wave with the microphone 26, the amount of light absorption of the sample liquid 20 is measured, and qualitative and quantitative analysis of the sample liquid 20 is performed based on this amount of light absorption.

[発明が解決しようとする課題] 従来の液状試料吸光分析測定装置は、上述したように、
測定用変調光の変調に1kHz以下で使用可能なメカニ
カルチョッパ等が用いられ、かつ粒子変位に敏感なマイ
クロホンを用いて光音響信号を粒子変位に比例する信号
として受信していた。
[Problems to be Solved by the Invention] As mentioned above, the conventional liquid sample absorption analysis measuring device has the following problems:
A mechanical chopper or the like that can be used at a frequency of 1 kHz or less is used to modulate the modulated light for measurement, and a microphone sensitive to particle displacement is used to receive a photoacoustic signal as a signal proportional to particle displacement.

この場合、変調周波数に反比例して感度か減少するので
、高くとも1kHz以下で使用しなければならないとい
う制限かあり、このため、周囲の雑音を拾いやすく、振
動に弱いと共に信号処理に時間を要する等の不具合かあ
った。加えて、信号処理に時間が掛かるため試料液の温
度定上昇による物性値変化や熱運動による信号のドリフ
トによって再現性の低下や、増幅回路の温度ドリフトに
よる信頼性の低下を引き起こしやすかった。また、商用
周波数に接近し過ぎているために商用周波数ノイズの除
去が有効に行えない等の課題があった。
In this case, the sensitivity decreases in inverse proportion to the modulation frequency, so there is a restriction that it must be used at at most 1kHz or less, so it easily picks up ambient noise, is susceptible to vibration, and requires time for signal processing. There were some problems. In addition, since signal processing takes time, it is easy to cause a decrease in reproducibility due to changes in physical properties due to constant temperature rise of the sample liquid and signal drift due to thermal motion, and a decrease in reliability due to temperature drift in the amplifier circuit. In addition, there was a problem that commercial frequency noise could not be effectively removed because it was too close to the commercial frequency.

更に、試料液の蒸気及び飛沫かマイクロホンやセルの接
着部分に到達するために耐久性に劣り、汚れやすいため
、微量測定時に信頼性に欠けるという課題があった。
Furthermore, since the vapor and droplets of the sample liquid reach the bonded parts of the microphone and cell, they have poor durability and are easily soiled, resulting in a lack of reliability when measuring trace amounts.

発明の目的 本発明は、上記従来の課題に鑑みなされたちのであり、
その目的は、数10kHz〜数MHzで変調をかけられ
た測定用変調光に対して十分な感度を持ち音圧に敏感な
液状試料吸光分析測定用光音響セルを提供することにあ
る。
Purpose of the Invention The present invention has been made in view of the above-mentioned conventional problems.
The purpose is to provide a photoacoustic cell for liquid sample absorption analysis measurement that has sufficient sensitivity to measurement modulated light modulated at several tens of kHz to several MHz and is sensitive to sound pressure.

[課題を解決するための手段] 上記目的を達成させるために、本発明に係る液状試料吸
光分析測定用光音響セルは、液状試料に測定用変調光を
照射し、前記液状試料の光吸収熱にて生ずる音波を測定
して前記液状試料の分析を行う液状試料吸光分析測定装
置において、前記液状試料を入れる透明な測定管と、前
記測定管の両端に設けられた音波反射仕切弁と、前記測
定管を嵌挿させた円筒形状の共振器と、前記共振器に貼
着された音波測定圧電体と、を有することを特徴とする
[Means for Solving the Problems] In order to achieve the above object, the photoacoustic cell for liquid sample absorption analysis measurement according to the present invention irradiates a liquid sample with modulated light for measurement, and absorbs the light absorption heat of the liquid sample. A liquid sample absorption analysis measuring device for analyzing the liquid sample by measuring sound waves generated by the liquid sample, comprising: a transparent measurement tube into which the liquid sample is placed; a sound wave reflecting gate valve provided at both ends of the measurement tube; It is characterized by comprising a cylindrical resonator into which a measurement tube is inserted, and a piezoelectric material for measuring sound waves attached to the resonator.

[作用] 上記構成によれば、分析が行われる液状試料は測定管内
の音波反射仕切弁の間に封入される。そして、この液状
試料に測定用変調光を照射した際に生ずる音波は、測定
管を嵌挿させた共振器にて伝達されて音波測定圧電体に
て検出される。
[Operation] According to the above configuration, the liquid sample to be analyzed is sealed between the sound wave reflecting gate valves in the measurement tube. Then, the sound waves generated when the liquid sample is irradiated with the modulated light for measurement are transmitted through a resonator into which a measurement tube is inserted, and detected by the sound wave measurement piezoelectric body.

[実施例〕 以下、この発明の一実施例を図について説明する。[Example〕 An embodiment of the present invention will be described below with reference to the drawings.

第1図には、液状試料吸光分析n1定装置において用い
られる光音響セル30の好適な実施例か示されている。
FIG. 1 shows a preferred embodiment of a photoacoustic cell 30 for use in a liquid sample absorption analysis n1 determination apparatus.

この光音響セル30は、図に示すように、透明な細長い
共鳴管としての石英管32を有しており、石英管32の
両端には音響インピーダンスの大きい手動コックから成
る液状試料を仕切るための弁34.36が配置されてい
る。ここで、両仕切弁34.36間の石英管32により
試料液20を貯留する試料室22が形成されている。
As shown in the figure, this photoacoustic cell 30 has a quartz tube 32 as a transparent long and narrow resonant tube, and a manual cock with a large acoustic impedance is installed at both ends of the quartz tube 32 to separate a liquid sample. Valves 34,36 are arranged. Here, a sample chamber 22 in which a sample liquid 20 is stored is formed by a quartz tube 32 between both gate valves 34 and 36.

そして、石英管32にはアルミ、真鍮等の金属部材から
成る円筒状の共振器38か外嵌されている。この共振器
38の外周面にはリング状のPZT等の圧電部材40が
貼着されており、これによリセンサが構成されている。
A cylindrical resonator 38 made of a metal member such as aluminum or brass is fitted onto the quartz tube 32. A ring-shaped piezoelectric member 40 made of PZT or the like is adhered to the outer peripheral surface of the resonator 38, thereby forming a resensor.

また、図示されてはいないが、石英管32の側方から測
定用変調光としてのレーザ光が照射されるようになって
おり、試料室22に貯留される試料液20にレーザ光を
照射することにより試料液20は光吸収に伴い熱を発生
し、これにより音波が発生されるようになっている。
Although not shown, a laser beam as modulated light for measurement is irradiated from the side of the quartz tube 32, and the sample liquid 20 stored in the sample chamber 22 is irradiated with the laser beam. As a result, the sample liquid 20 generates heat as it absorbs light, thereby generating sound waves.

更に、仕切弁間の長さをL1音速をVとすると、発生す
る音波か所定倍振動の場合、振動数f及び波長λは次式
により求められる。
Further, if the length between the gate valves is L1 and the sound velocity is V, then if the generated sound wave has a predetermined frequency of vibration, the frequency f and the wavelength λ can be determined by the following equation.

f−Vn/2L[Hzコ       ・  (100
)λ−21−/n          −= (101
)(n−2,3,4・・・・・・) 例えば、発生する音波が第3倍振動の場合、音圧分布は
第1図のようになる。ここで、共振器38は腹の位置に
なるように外嵌されており、またレーザ光も同様に共振
器38が位置しない腹の位置に照射されるようになって
いる。
f-Vn/2L [Hz co・(100
)λ−21−/n−=(101
)(n-2, 3, 4...) For example, if the generated sound wave is the third harmonic vibration, the sound pressure distribution will be as shown in FIG. Here, the resonator 38 is fitted onto the outside so as to be at the antinode position, and the laser beam is similarly irradiated to the antinode position where the resonator 38 is not located.

次に、第2図を用いて上述した光音響セル30を用いた
液状試料吸光分析測定装置の構成について説明する。
Next, the configuration of a liquid sample absorption analysis measurement apparatus using the photoacoustic cell 30 described above will be explained using FIG.

図において、42は測定用変調光の変調を行うだめの変
調信号発生器であり、この変調信号発生器42の出力は
レーザダイオード駆動器43に送出されると共に、後述
するロックインアンプ44にその同期信号として送出さ
れている。
In the figure, 42 is a modulation signal generator for modulating the modulated light for measurement, and the output of this modulation signal generator 42 is sent to a laser diode driver 43 and also to a lock-in amplifier 44, which will be described later. It is sent as a synchronization signal.

そして、レーザダイオード駆動器43にはレーザダイオ
ード45か接続されており、レーザダイオード45から
発射されたレーザ光はレンズ等の光学系46により光音
響セル30に照射される。
A laser diode 45 is also connected to the laser diode driver 43, and the laser light emitted from the laser diode 45 is irradiated onto the photoacoustic cell 30 by an optical system 46 such as a lens.

更に、液状試料吸光分析測定用光音響セル30の圧電部
材40の出力側には、プリアンプ47が接続されており
、プリアンプ47には前記ロックインアンプ44が接続
されている。
Furthermore, a preamplifier 47 is connected to the output side of the piezoelectric member 40 of the photoacoustic cell 30 for liquid sample absorption analysis measurement, and the lock-in amplifier 44 is connected to the preamplifier 47.

そして、ロックインアンプ44には信号処理器48が接
続されており、信号処理器48にはデイスプレィ49及
び記録器50が接続されている。
A signal processor 48 is connected to the lock-in amplifier 44, and a display 49 and a recorder 50 are connected to the signal processor 48.

ここで、変調信号発生器42からの変調信号が発振され
ると、発振された変調信号によりレーザダイオード駆動
器43はレーザダイオード45を駆動してレーザダイオ
ード45からレーザ光が発射される。
Here, when the modulation signal from the modulation signal generator 42 is oscillated, the laser diode driver 43 drives the laser diode 45 using the oscillated modulation signal, and the laser diode 45 emits a laser beam.

そして、試料室22に試料液20が貯留された液状試料
吸光分析測定用光音響セル30の音波の腹の位置にレー
ザ光は照射される。
Then, the laser light is irradiated onto the antinode of the sound wave in the liquid sample absorption analysis measurement photoacoustic cell 30 in which the sample liquid 20 is stored in the sample chamber 22 .

この場合、試料室22に貯留されている試料液20は光
吸収に伴い熱を発生し、この熱にて周期的な熱流が生し
試料液20は振動する。なお、この音波の振動数f及び
波長λは上記(100)式及び(101)式より求めら
れる。
In this case, the sample liquid 20 stored in the sample chamber 22 generates heat as it absorbs light, and this heat generates a periodic heat flow, causing the sample liquid 20 to vibrate. Note that the frequency f and wavelength λ of this sound wave are obtained from the above equations (100) and (101).

そして、試料液20の振動に伴い共振器38か共振し、
共振器38の外周面に貼着されているリング状のPZT
等の圧電部材40はこの振動を電気信号に変換する。
Then, the resonator 38 resonates with the vibration of the sample liquid 20,
Ring-shaped PZT adhered to the outer peripheral surface of the resonator 38
The piezoelectric member 40 converts this vibration into an electrical signal.

更に、圧電部材40により変換された電気信号は、プリ
アンプ47により増幅され、増幅された信号はロックイ
ンアンプ44を介して信号処理器48に入力されて所定
の信号処理が行われる。
Further, the electrical signal converted by the piezoelectric member 40 is amplified by a preamplifier 47, and the amplified signal is input to a signal processor 48 via a lock-in amplifier 44, where predetermined signal processing is performed.

この後、信号処理器48の処理結果(試料液20の定性
・定量分析結果)はデイスプレィ49に表示されると共
に記録器50に記録される。
Thereafter, the processing results of the signal processor 48 (qualitative/quantitative analysis results of the sample liquid 20) are displayed on the display 49 and recorded on the recorder 50.

ここにおいて、本出願人による実験では、光音響セル3
0は数10kHz〜数MHzの変調をかけられたレーザ
光に対して十分な感度を持つことか確認されている。
Here, in the experiment conducted by the applicant, the photoacoustic cell 3
0 has been confirmed to have sufficient sensitivity to laser light modulated at several tens of kHz to several MHz.

なお、上述実施例においては、仕切弁34,36に手動
コックを用いたか、これに限らず、電磁′弁等を用いて
もよい。このようにすると、工場生産ラインの配管内に
光音響セル30を配置してオンラインモニター用として
使用することが可能である。
In the above embodiment, manual cocks were used for the gate valves 34 and 36, but the present invention is not limited to this, and electromagnetic valves or the like may be used. In this way, the photoacoustic cell 30 can be placed inside the piping of a factory production line and used for online monitoring.

また、センサの共振Q値の調整のために、圧電部材40
の外周にゴム材を貼着したり、センサをモールドするこ
とも可能である。
In addition, a piezoelectric member 40 is used to adjust the resonance Q value of the sensor.
It is also possible to attach a rubber material to the outer periphery of the sensor or mold the sensor.

更に、上述実施例においては、レーザダイオードを用い
て説明したが、周波数fを数MHz以上に限定すれば、
Xeランプや他のレーザの使用が可能である。
Furthermore, in the above embodiment, explanation was given using a laser diode, but if the frequency f is limited to several MHz or more,
Xe lamps or other lasers can be used.

[発明の効果] 以上説明したように、本発明に係る液状試料吸光分析測
定用光音響セルによれば、数10kHz〜数MHzにお
いて変調をかけた変調光に対して十分な感度を有するセ
ンサを実現することができたので、周囲の電源ノイズ等
の雑音を分離して測定が可能であり、また極めて振動に
強い光音響セルを提供可能である。また、測定される試
料の温度上昇による検出信号のドリフトの影響を受けに
くくなり、測定における再現性を向上させることが可能
である。加えて、試料が封入されているので、試料の蒸
気及び粉末が測定を行うセンサや他の部分に飛散するこ
とがなく、極めて安全にかつ測定の信頼性を向上させる
ことができる。
[Effects of the Invention] As explained above, according to the photoacoustic cell for liquid sample absorption analysis measurement according to the present invention, a sensor having sufficient sensitivity to modulated light modulated at several tens of kHz to several MHz can be used. Since this has been realized, it is possible to perform measurements while separating noise such as surrounding power supply noise, and it is also possible to provide a photoacoustic cell that is extremely resistant to vibrations. Furthermore, the detection signal is less susceptible to drift due to a rise in the temperature of the sample to be measured, making it possible to improve reproducibility in measurement. In addition, since the sample is encapsulated, the vapor and powder of the sample will not scatter to the sensor or other parts that perform the measurement, making it possible to extremely safely and improve the reliability of the measurement.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の液状試料吸光分析測定用光音響セル
の構成を示す斜視図、 第2図は、液状試料吸光分析測定用光音響セルを組み込
んだ実験装置の構成を示すブロック図、第3図は、従来
の液状試料吸光分析測定用光音響セルの構成を示す断面
図である。 30 ・・・ 液状試料吸光分析測定用光音響セル32
 ・・・ 石英管 34.36  ・・・ 仕切弁 38 ・・・ 共振器 40 ・・・ 圧電部材
FIG. 1 is a perspective view showing the configuration of a photoacoustic cell for liquid sample absorption analysis measurement of the present invention, FIG. 2 is a block diagram showing the configuration of an experimental apparatus incorporating the photoacoustic cell for liquid sample absorption analysis measurement of the present invention, FIG. 3 is a sectional view showing the configuration of a conventional photoacoustic cell for absorption analysis measurement of a liquid sample. 30... Photoacoustic cell 32 for liquid sample absorption analysis measurement
... Quartz tube 34, 36 ... Gate valve 38 ... Resonator 40 ... Piezoelectric member

Claims (1)

【特許請求の範囲】 液状試料に測定用変調光を照射し、前記液状試料の光吸
収熱にて生ずる音波を測定して前記液状試料の分析を行
う液状試料吸光分析測定装置において、 前記液状試料を入れる透明な測定管と、 前記測定管の両端に設けられた音波反射仕切弁と、 前記測定管を嵌挿させた円筒形状の共振器と、前記共振
器に貼着された音波測定圧電体と、を有することを特徴
とする液状試料吸光分析測定用光音響セル。
[Scope of Claims] A liquid sample absorption analysis measurement device that analyzes the liquid sample by irradiating the liquid sample with a modulated light for measurement and measuring sound waves generated by light absorption heat of the liquid sample, comprising: a transparent measurement tube into which the measurement tube is inserted, a sound wave reflecting gate valve provided at both ends of the measurement tube, a cylindrical resonator into which the measurement tube is fitted, and a sound wave measurement piezoelectric body affixed to the resonator. A photoacoustic cell for liquid sample absorption analysis measurement, characterized in that it has the following.
JP2172423A 1990-06-28 1990-06-28 Photoacoustic cell for absorption measurement of liquid samples Expired - Lifetime JPH087193B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2172423A JPH087193B2 (en) 1990-06-28 1990-06-28 Photoacoustic cell for absorption measurement of liquid samples

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2172423A JPH087193B2 (en) 1990-06-28 1990-06-28 Photoacoustic cell for absorption measurement of liquid samples

Publications (2)

Publication Number Publication Date
JPH0460441A true JPH0460441A (en) 1992-02-26
JPH087193B2 JPH087193B2 (en) 1996-01-29

Family

ID=15941696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2172423A Expired - Lifetime JPH087193B2 (en) 1990-06-28 1990-06-28 Photoacoustic cell for absorption measurement of liquid samples

Country Status (1)

Country Link
JP (1) JPH087193B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006292639A (en) * 2005-04-13 2006-10-26 Chiba Univ Acoustic cavity, and resonance acoustic spectroscopy unit for fluid using the same
JP2013228394A (en) * 2012-04-25 2013-11-07 Testo Ag Measurement device and measurement method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006292639A (en) * 2005-04-13 2006-10-26 Chiba Univ Acoustic cavity, and resonance acoustic spectroscopy unit for fluid using the same
JP4500965B2 (en) * 2005-04-13 2010-07-14 国立大学法人 千葉大学 Acoustic cavity and resonant acoustic spectroscopy apparatus for fluids using the same
JP2013228394A (en) * 2012-04-25 2013-11-07 Testo Ag Measurement device and measurement method

Also Published As

Publication number Publication date
JPH087193B2 (en) 1996-01-29

Similar Documents

Publication Publication Date Title
US5129262A (en) Plate-mode ultrasonic sensor
US8109128B2 (en) Cavity-enhanced photo acoustic trace gas detector with improved feedback loop
US5189914A (en) Plate-mode ultrasonic sensor
Fatemi et al. Application of radiation force in noncontact measurement of the elastic parameters
US8594507B2 (en) Method and apparatus for measuring gas concentrations
WO2018188429A1 (en) Beat effect-based quartz-enhanced photoacoustic spectroscopy gas detection apparatus and method
Solodov et al. Noncontact sonic NDE and defect imaging via local defect resonance
CN111220551B (en) Photo-thermal spectrum trace gas detection device and method based on tuning fork resonance
JPS62165127A (en) Dust protecting method for optical equipment
JP2008544291A (en) Photoacoustic free field detector
US4683750A (en) Thermal acoustic probe
US5151590A (en) Photoacoustic cell and photoacoustic measuring device
US4200399A (en) Resonant optoacoustic spectroscopy apparatus
JP7179478B2 (en) Gas sensor and gas detection method
JPH0460441A (en) Photoacoustic cell for absorption analysis measurement of liquid sample
US2522924A (en) Supersonic inspection apparatus
JPH08271336A (en) Photo-acoustic spectroscopic device
JP2582137B2 (en) Method and apparatus for measuring physical properties of liquid
JP2010185772A (en) Sensor element and sensor device including the same
JPH04175640A (en) Method of detecting optical audio signal and detector
JPS628514Y2 (en)
JPH11223623A (en) Material property measuring device
JP4068908B2 (en) Sound pressure sensor
JP4465473B2 (en) High resolution sound velocity measuring method and apparatus for fluid
Rai et al. Design, characterization, and applications of photoacoustic cells and spectrometer