JPH0458999U - - Google Patents

Info

Publication number

JPH0458999U

JPH0458999U JP9981090U JP9981090U JPH0458999U JP H0458999 U JPH0458999 U JP H0458999U JP 9981090 U JP9981090 U JP 9981090U JP 9981090 U JP9981090 U JP 9981090U JP H0458999 U JPH0458999 U JP H0458999U

Authority

JP

Japan

Prior art keywords

film

black

thin film

transparent electrode

back electrode

Prior art date

1990-09-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010409 thin film Substances 0.000 claims description 10
• 239000004020 conductor Substances 0.000 claims description 7
• 239000010408 film Substances 0.000 claims 8
• 239000000463 material Substances 0.000 claims 2
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
• 230000002950 deficient Effects 0.000 claims 1
• 229910052751 metal Inorganic materials 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 229910052760 oxygen Inorganic materials 0.000 claims 1
• 239000001301 oxygen Substances 0.000 claims 1
• BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 1
• PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims 1
• 239000011521 glass Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1