JPH0456371U - - Google Patents

Info

Publication number
JPH0456371U
JPH0456371U JP9828890U JP9828890U JPH0456371U JP H0456371 U JPH0456371 U JP H0456371U JP 9828890 U JP9828890 U JP 9828890U JP 9828890 U JP9828890 U JP 9828890U JP H0456371 U JPH0456371 U JP H0456371U
Authority
JP
Japan
Prior art keywords
cleaned
cleaning
cleaning device
liquid
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9828890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9828890U priority Critical patent/JPH0456371U/ja
Publication of JPH0456371U publication Critical patent/JPH0456371U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Nozzles (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP9828890U 1990-09-19 1990-09-19 Pending JPH0456371U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9828890U JPH0456371U (enrdf_load_stackoverflow) 1990-09-19 1990-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9828890U JPH0456371U (enrdf_load_stackoverflow) 1990-09-19 1990-09-19

Publications (1)

Publication Number Publication Date
JPH0456371U true JPH0456371U (enrdf_load_stackoverflow) 1992-05-14

Family

ID=31839349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9828890U Pending JPH0456371U (enrdf_load_stackoverflow) 1990-09-19 1990-09-19

Country Status (1)

Country Link
JP (1) JPH0456371U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015213860A (ja) * 2014-05-08 2015-12-03 東洋熱工業株式会社 異物除去装置
JP2020527689A (ja) * 2017-07-14 2020-09-10 レナ テクノロジー ゲーエムベーハーＲＥＮＡ Ｔｅｃｈｎｏｌｏｇｉｅｓ ＧｍｂＨ 基板を乾燥させるための乾燥装置及び方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015213860A (ja) * 2014-05-08 2015-12-03 東洋熱工業株式会社 異物除去装置
JP2020527689A (ja) * 2017-07-14 2020-09-10 レナ テクノロジー ゲーエムベーハーＲＥＮＡ Ｔｅｃｈｎｏｌｏｇｉｅｓ ＧｍｂＨ 基板を乾燥させるための乾燥装置及び方法
US12372300B2 (en) 2017-07-14 2025-07-29 RENA Technologies GmbH Drying device and method for drying a substrate

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