JPH045635U - - Google Patents
Info
- Publication number
- JPH045635U JPH045635U JP4588590U JP4588590U JPH045635U JP H045635 U JPH045635 U JP H045635U JP 4588590 U JP4588590 U JP 4588590U JP 4588590 U JP4588590 U JP 4588590U JP H045635 U JPH045635 U JP H045635U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- rail
- cradle
- spin dryer
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4588590U JPH045635U (cs) | 1990-04-27 | 1990-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4588590U JPH045635U (cs) | 1990-04-27 | 1990-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH045635U true JPH045635U (cs) | 1992-01-20 |
Family
ID=31560462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4588590U Pending JPH045635U (cs) | 1990-04-27 | 1990-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH045635U (cs) |
-
1990
- 1990-04-27 JP JP4588590U patent/JPH045635U/ja active Pending
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