JPH0456333U - - Google Patents
Info
- Publication number
- JPH0456333U JPH0456333U JP9998990U JP9998990U JPH0456333U JP H0456333 U JPH0456333 U JP H0456333U JP 9998990 U JP9998990 U JP 9998990U JP 9998990 U JP9998990 U JP 9998990U JP H0456333 U JPH0456333 U JP H0456333U
- Authority
- JP
- Japan
- Prior art keywords
- quartz chamber
- internal electrode
- electrode terminal
- ground
- semiconductor manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998990U JPH0456333U (enExample) | 1990-09-25 | 1990-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998990U JPH0456333U (enExample) | 1990-09-25 | 1990-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0456333U true JPH0456333U (enExample) | 1992-05-14 |
Family
ID=31842304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9998990U Pending JPH0456333U (enExample) | 1990-09-25 | 1990-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0456333U (enExample) |
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1990
- 1990-09-25 JP JP9998990U patent/JPH0456333U/ja active Pending