JPH0456333U - - Google Patents

Info

Publication number
JPH0456333U
JPH0456333U JP9998990U JP9998990U JPH0456333U JP H0456333 U JPH0456333 U JP H0456333U JP 9998990 U JP9998990 U JP 9998990U JP 9998990 U JP9998990 U JP 9998990U JP H0456333 U JPH0456333 U JP H0456333U
Authority
JP
Japan
Prior art keywords
quartz chamber
internal electrode
electrode terminal
ground
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9998990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9998990U priority Critical patent/JPH0456333U/ja
Publication of JPH0456333U publication Critical patent/JPH0456333U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP9998990U 1990-09-25 1990-09-25 Pending JPH0456333U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9998990U JPH0456333U (enrdf_load_html_response) 1990-09-25 1990-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9998990U JPH0456333U (enrdf_load_html_response) 1990-09-25 1990-09-25

Publications (1)

Publication Number Publication Date
JPH0456333U true JPH0456333U (enrdf_load_html_response) 1992-05-14

Family

ID=31842304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9998990U Pending JPH0456333U (enrdf_load_html_response) 1990-09-25 1990-09-25

Country Status (1)

Country Link
JP (1) JPH0456333U (enrdf_load_html_response)

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