JPH0456332U - - Google Patents

Info

Publication number
JPH0456332U
JPH0456332U JP9998490U JP9998490U JPH0456332U JP H0456332 U JPH0456332 U JP H0456332U JP 9998490 U JP9998490 U JP 9998490U JP 9998490 U JP9998490 U JP 9998490U JP H0456332 U JPH0456332 U JP H0456332U
Authority
JP
Japan
Prior art keywords
processing chamber
electrode provided
insulator
wafer
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9998490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9998490U priority Critical patent/JPH0456332U/ja
Publication of JPH0456332U publication Critical patent/JPH0456332U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP9998490U 1990-09-25 1990-09-25 Pending JPH0456332U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9998490U JPH0456332U (US06623731-20030923-C00012.png) 1990-09-25 1990-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9998490U JPH0456332U (US06623731-20030923-C00012.png) 1990-09-25 1990-09-25

Publications (1)

Publication Number Publication Date
JPH0456332U true JPH0456332U (US06623731-20030923-C00012.png) 1992-05-14

Family

ID=31842294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9998490U Pending JPH0456332U (US06623731-20030923-C00012.png) 1990-09-25 1990-09-25

Country Status (1)

Country Link
JP (1) JPH0456332U (US06623731-20030923-C00012.png)

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