JPH045414A - Exhaust gas purifying device - Google Patents
Exhaust gas purifying deviceInfo
- Publication number
- JPH045414A JPH045414A JP2105022A JP10502290A JPH045414A JP H045414 A JPH045414 A JP H045414A JP 2105022 A JP2105022 A JP 2105022A JP 10502290 A JP10502290 A JP 10502290A JP H045414 A JPH045414 A JP H045414A
- Authority
- JP
- Japan
- Prior art keywords
- filter
- exhaust gas
- purification device
- gas purification
- particulates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007667 floating Methods 0.000 claims abstract description 3
- 238000000746 purification Methods 0.000 claims description 24
- 239000003054 catalyst Substances 0.000 claims description 15
- 239000000919 ceramic Substances 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 3
- 239000012777 electrically insulating material Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 abstract description 10
- 239000012212 insulator Substances 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 48
- 238000000034 method Methods 0.000 description 7
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 6
- 229910052863 mullite Inorganic materials 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 5
- 238000002485 combustion reaction Methods 0.000 description 4
- 229910052878 cordierite Inorganic materials 0.000 description 4
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000013618 particulate matter Substances 0.000 description 2
- 239000004071 soot Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000012494 Quartz wool Substances 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000011491 glass wool Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/66—Regeneration of the filtering material or filter elements inside the filter
- B01D46/80—Chemical processes for the removal of the retained particles, e.g. by burning
- B01D46/84—Chemical processes for the removal of the retained particles, e.g. by burning by heating only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/92—Chemical or biological purification of waste gases of engine exhaust gases
- B01D53/94—Chemical or biological purification of waste gases of engine exhaust gases by catalytic processes
- B01D53/9445—Simultaneously removing carbon monoxide, hydrocarbons or nitrogen oxides making use of three-way catalysts [TWC] or four-way-catalysts [FWC]
- B01D53/945—Simultaneously removing carbon monoxide, hydrocarbons or nitrogen oxides making use of three-way catalysts [TWC] or four-way-catalysts [FWC] characterised by a specific catalyst
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/92—Chemical or biological purification of waste gases of engine exhaust gases
- B01D53/94—Chemical or biological purification of waste gases of engine exhaust gases by catalytic processes
- B01D53/9445—Simultaneously removing carbon monoxide, hydrocarbons or nitrogen oxides making use of three-way catalysts [TWC] or four-way-catalysts [FWC]
- B01D53/9454—Simultaneously removing carbon monoxide, hydrocarbons or nitrogen oxides making use of three-way catalysts [TWC] or four-way-catalysts [FWC] characterised by a specific device
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/02—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust
- F01N3/021—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters
- F01N3/0211—Arrangements for mounting filtering elements in housing, e.g. with means for compensating thermal expansion or vibration
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/02—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust
- F01N3/021—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters
- F01N3/0215—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters the filtering elements having the form of disks or plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/02—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust
- F01N3/021—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters
- F01N3/022—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters characterised by specially adapted filtering structure, e.g. honeycomb, mesh or fibrous
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/02—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust
- F01N3/021—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters
- F01N3/023—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters using means for regenerating the filters, e.g. by burning trapped particles
- F01N3/027—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters using means for regenerating the filters, e.g. by burning trapped particles using electric or magnetic heating means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
- F01N3/10—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
- F01N3/24—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by constructional aspects of converting apparatus
- F01N3/28—Construction of catalytic reactors
- F01N3/2882—Catalytic reactors combined or associated with other devices, e.g. exhaust silencers or other exhaust purification devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
- B01D2279/30—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for treatment of exhaust gases from IC Engines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2250/00—Combinations of different methods of purification
- F01N2250/02—Combinations of different methods of purification filtering and catalytic conversion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2330/00—Structure of catalyst support or particle filter
- F01N2330/10—Fibrous material, e.g. mineral or metallic wool
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2450/00—Methods or apparatus for fitting, inserting or repairing different elements
- F01N2450/24—Methods or apparatus for fitting, inserting or repairing different elements by bolts, screws, rivets or the like
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T10/00—Road transport of goods or passengers
- Y02T10/10—Internal combustion engine [ICE] based vehicles
- Y02T10/12—Improving ICE efficiencies
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Geology (AREA)
- Toxicology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
- Catalysts (AREA)
- Processes For Solid Components From Exhaust (AREA)
- Filtering Materials (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野]
本発明は環境上問題となる排ガス中の微粒子を捕捉する
排ガス浄化装置に係り、更に詳しくはディーゼルエンジ
ンの排ガス中の窒素酸化1Fl(NOx)や微粒子状炭
素物!(パティキュレート)あるいはボイラーの排ガス
中の煤などを捕捉するフィルタを備えた排ガス浄化装置
に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an exhaust gas purification device that captures particulates in exhaust gas that pose an environmental problem, and more specifically to nitrogen oxide 1Fl (NOx) in exhaust gas from diesel engines. And fine particulate carbon substances! This invention relates to an exhaust gas purification device equipped with a filter that captures particulate matter or soot in the exhaust gas of a boiler.
〔従来の技術及び発明が解決しようとする課題〕ディー
ゼルエンジンの排ガス中に含まれるNOxやパティキュ
レート、あるいはボイラーの排ガス中の煤などは環境上
問題となるので、しばしばフィルタを用いて除去される
。その場合、限界以上に微粒子を捕捉し目詰まりしたフ
ィルタは、新しいものと交換するか、あるいは、捕捉し
た微粒子を何らかの方法で除去して再生する必要がある
。[Prior art and problems to be solved by the invention] NOx and particulates contained in the exhaust gas of diesel engines, soot in the exhaust gas of boilers, etc. are environmental problems and are often removed using filters. . In this case, a filter that has become clogged due to trapping more particles than its limit must be replaced with a new one, or the filter must be regenerated by removing the trapped particles by some method.
例えば、コージェライトなどの耐熱性の高いセラミック
スや金属メソシュからなるフィルタを用いた場合、バー
ナや電気ヒータなどの熱源によって、堆積した微粒子を
焼却することが従来がら行なわれている。しかしその場
合、燃焼によってフィルタの損壊や溶損を招き易いので
、微粒子の堆積量や排ガス中の酸素量を制限しなければ
ならない。For example, when using a filter made of a highly heat-resistant ceramic such as cordierite or a metal mesh, deposited fine particles are conventionally incinerated using a heat source such as a burner or an electric heater. However, in that case, the filter is likely to be damaged or melted due to combustion, so the amount of deposited particulates and the amount of oxygen in the exhaust gas must be limited.
ディーゼルエンジンの排ガスを浄化する目的で、微粒子
の堆積量を制御しつつ自動的な焼却を行なうには、堆積
による排圧の変化を検出して熱源を作動させる必要があ
った。しかしその方法によれば、検出レベルを高速運転
に伴なう高圧時に熱源が作動するように合わせると、低
速運転が続いたときには熱源が作動せずにフィルタが目
詰まりを起こし易く、逆に低圧時に検出レベルを合わせ
ると、熱源の無駄な作動が多くなる。特に前者の場合は
燃費の悪化をもたらす。In order to control the amount of accumulated particulates and automatically incinerate them for the purpose of purifying diesel engine exhaust gas, it was necessary to detect changes in exhaust pressure due to accumulation and activate the heat source. However, according to this method, if the detection level is adjusted so that the heat source operates at high pressures associated with high-speed operation, the heat source will not operate when low-speed operation continues and the filter will easily become clogged, and conversely, the low pressure If the detection levels are sometimes matched, the heat source will often operate in vain. Particularly in the former case, fuel efficiency deteriorates.
この問題を解決するため、フィルタを再生する1つの方
法として、絶縁材料で作ったフィルタに電極を取付け、
電極が導電性の微粒子を介して導通したとき、通電で発
生した熱を利用して微粒子を焼却する方法がある(特開
昭57−203812号)。To solve this problem, one way to regenerate the filter is to attach electrodes to the filter made of insulating material.
There is a method in which when an electrode is electrically connected through conductive particles, the particles are incinerated by using the heat generated by energization (Japanese Patent Application Laid-Open No. 57-203812).
第5図はこの原理を用いた従来技術の排ガス浄化装置の
一例で、全体がポーラス状の物質から成る絶縁材料のフ
ィルタ1に電極棒2を埋め込んだものを示す。この排ガ
ス浄化装置では、広い部分にわたって堆積した微粒子を
電気導通により完全に焼却することは困難であり、従っ
て目詰まり(斜線部分)を完全に解消することは事実上
不可能である。FIG. 5 shows an example of a conventional exhaust gas purification device using this principle, in which electrode rods 2 are embedded in a filter 1 made of an insulating material made entirely of porous material. In this exhaust gas purification device, it is difficult to completely incinerate particulates accumulated over a wide area by electrical conduction, and therefore it is virtually impossible to completely eliminate clogging (shaded area).
第6図は、別の従来技術の排ガス浄化装置を示したもの
で、絶縁材料でできたフィルタ1の両端面に電極2.2
を配置したものである。この場合、フィルタの入口側端
面近くに微粒子が堆積しやすいため、電極間が導通する
前に目詰まり(斜線部分)を起こしやすい。これを解消
しようとして、電極間の電圧を上げると、局所的に過大
な電流が流れ、フィルタを損壊させてしまう。FIG. 6 shows another conventional exhaust gas purification device, in which electrodes 2 and 2 are attached to both end faces of a filter 1 made of an insulating material.
is arranged. In this case, fine particles tend to accumulate near the end face on the inlet side of the filter, which tends to cause clogging (shaded area) before the electrodes are electrically connected. In an attempt to solve this problem, if the voltage between the electrodes is increased, an excessive current flows locally, damaging the filter.
また、第7図に示すような従来技術の排ガス浄化装置の
場合、円柱形状のフィルタ1に多数の貫通孔11が設け
られ、各々の貫通孔11の一方の口は電極板12で塞が
れ、さらに貫通孔11の内壁には電極線13が設けられ
ている。このフィルタにおいて、電極間が導通するとフ
ィルタ1のほぼ全域での焼却が可能なため、上述のよう
な目詰まりは起こりにくい。しかし、電極線13が排気
の妨げとなるし、また電極線13を貫通孔11に挿入し
てフィルタに密着させる作業が困難である。Furthermore, in the case of a conventional exhaust gas purification device as shown in FIG. Furthermore, an electrode wire 13 is provided on the inner wall of the through hole 11 . In this filter, when the electrodes are electrically connected, almost the entire area of the filter 1 can be incinerated, so that clogging as described above is unlikely to occur. However, the electrode wire 13 obstructs exhaust air, and it is difficult to insert the electrode wire 13 into the through hole 11 and bring it into close contact with the filter.
従って本発明の目的は、排ガス中に含まれる環境上有害
な微粒子をフィルタで捕捉するとともに、フィルタを効
率良く再生することが可能で、特にディーゼルエンジン
等の排ガス中に含まれるパティキュレートを効率的に燃
焼するとともに、他の有害ガス成分である未燃焼炭化水
素(以下HCと呼ぶ)とCO,NOxなどを浄化する機
能を有する排ガス浄化装置を提供することである。Therefore, an object of the present invention is to enable a filter to capture environmentally harmful particulates contained in exhaust gas and to efficiently regenerate the filter, and in particular to efficiently remove particulates contained in exhaust gas from diesel engines, etc. An object of the present invention is to provide an exhaust gas purification device that has the function of combusting unburned hydrocarbons (hereinafter referred to as HC), CO, NOx, etc., which are other harmful gas components.
〔課題を解決するための手段]
上記課題に鑑み鋭意研究の結果、本発明者は、電気絶縁
性のフィルタと電極を交互に積層し、捕捉された微粒子
を通電により焼却する構造の排ガス浄化装置において、
エツチングにより凹凸を形成したフィルタ表面に触媒を
担持させることにより、良好な排ガス浄化効果を発揮す
ることができることを発見し、本発明を完成した。[Means for Solving the Problems] In view of the above problems, as a result of intensive research, the present inventor has developed an exhaust gas purification device having a structure in which electrically insulating filters and electrodes are alternately laminated, and the captured particulates are incinerated by passing electricity. In,
The present invention was completed based on the discovery that a good exhaust gas purifying effect can be achieved by supporting a catalyst on the surface of the filter, which has been etched to form irregularities.
すなわち、本発明の排ガス浄化装置は、不燃性かつ電気
絶縁性の材料からなり排ガス中に浮遊する微粒子を捕捉
するフィルタと、前記フィルタと交互に積層された電極
とを有し、隣接する電極間に電圧をかけておくことによ
り、前記フィルタに電気伝導性かつ燃焼性の微粒子が捕
捉されると、通電により加熱されてフィルタ内で随時焼
却されるもので、エツチング処理により微細な凹凸が形
成された前記フィルタの表面に触媒が担持されているこ
とを特徴とする。That is, the exhaust gas purification device of the present invention includes a filter made of a nonflammable and electrically insulating material that captures particulates floating in the exhaust gas, and electrodes that are stacked alternately with the filter, so that there is a gap between adjacent electrodes. By applying a voltage to the filter, when electrically conductive and combustible particles are captured by the filter, they are heated by the electricity and incinerated at any time within the filter, and fine irregularities are formed by the etching process. A catalyst is supported on the surface of the filter.
以下、本発明の実施例を、図面を参照して詳細に説明す
る。Embodiments of the present invention will be described in detail below with reference to the drawings.
第1図は本発明の一実施例による排ガス浄化装置の断面
図である。その構成を説明すると、排気通路3の途中に
、絶縁体4を介して導電性を有する電極2と多孔質のフ
ィルタ1が、交互に積層さた状態で、ハウジング5内に
保持されている。FIG. 1 is a sectional view of an exhaust gas purification device according to an embodiment of the present invention. To explain its structure, conductive electrodes 2 and porous filters 1 are alternately stacked in the middle of an exhaust passage 3 with an insulator 4 interposed therebetween, and are held in a housing 5.
フィルタ1と電極2は、第2図に示すように、中空円板
型の形状をしている。フィルタ1は薄いほど電極2に負
荷する電圧が低くて済むが、パティキュレートの捕集効
率を良くし、また製造コストを低くするためには、II
W1以上の厚さを有するのが望ましい。電極の形態とし
ては、第2図に示すような金’142a、パンチメタル
板2b、平板20などが良い。これらフィルタと電極に
よる積層体の中空部下面を絶縁性の遮蔽板6で塞ぎ、ボ
ルトでハウジング5に固定している。The filter 1 and the electrode 2 have a hollow disk shape, as shown in FIG. The thinner the filter 1 is, the lower the voltage applied to the electrode 2 will be, but in order to improve particulate collection efficiency and reduce manufacturing costs, II
It is desirable to have a thickness of W1 or more. Preferred forms of the electrode include gold plate 142a, punched metal plate 2b, and flat plate 20 as shown in FIG. The hollow lower surface of the laminate made of these filters and electrodes is closed with an insulating shielding plate 6 and fixed to the housing 5 with bolts.
第1図に戻って、各々の電極2はフィルタ1の端に一つ
おきに結線されていて、一方の組は接地電極7とし、他
方の組は非接地電極8として、フィルタをはさんで隣り
あう電極間に電圧がかかるようになっている。フィルタ
1には、コージェライト、ムライト等のセラミックスや
石英、ガラスウール等、絶縁性及び耐熱性の高い材料が
用いられる。電極2の材料は、エネルギー損失が小さく
、耐熱性及び耐食性を有し、かつ安価なものであること
が望ましい。絶縁体4は、常に排気ガス流にさらされる
ため、耐熱性、耐食性及び低膨張性を有する材料からな
ることが必要で、コージェライト、ムライト等のセラミ
ックスが望ましい。ハウジング5は耐熱、耐食性と強度
を有する材料が望ましく、例えばステンレス鋼が用いら
れる。 フィルタ1の表面には、第3図に示すように、
多数の微細な突起15が形成されていて、突起15には
触媒17が付着している。突起15を形成するには、触
媒17を付着させる前に、プラズマエツチングを含むス
パッタエツチングや、酸あるいはアルカリ等による化学
腐食によってエッチビットを形成する。Returning to FIG. 1, each electrode 2 is connected to every other end of the filter 1, with one set serving as a ground electrode 7 and the other set serving as a non-ground electrode 8, across the filter. A voltage is applied between adjacent electrodes. The filter 1 is made of a material with high insulation properties and heat resistance, such as ceramics such as cordierite and mullite, quartz, and glass wool. It is desirable that the material of the electrode 2 is low in energy loss, has heat resistance and corrosion resistance, and is inexpensive. Since the insulator 4 is constantly exposed to the exhaust gas flow, it needs to be made of a material that has heat resistance, corrosion resistance, and low expansion properties, and ceramics such as cordierite and mullite are preferable. The housing 5 is preferably made of a material that has heat resistance, corrosion resistance, and strength; for example, stainless steel is used. As shown in FIG. 3, on the surface of the filter 1,
A large number of fine protrusions 15 are formed, and a catalyst 17 is attached to the protrusions 15. To form the protrusions 15, etch bits are formed by sputter etching including plasma etching, or chemical etching with acid or alkali, before depositing the catalyst 17.
それらエッチピットの形成されない部分が残って突起1
5となる。突起15の大きさは、平均直径がサブミクロ
ンのオーダーで、アスペクト比(長さ/直径)が10以
下、特に8〜4であるのが好ましい。The parts where these etch pits are not formed remain and the protrusion 1
It becomes 5. The size of the projections 15 is preferably such that the average diameter is on the order of submicrons and the aspect ratio (length/diameter) is 10 or less, particularly 8 to 4.
突起I5による微細な凹凸の形成によりフィルタの表面
積が増大し、触媒の担持量が増加する。また、触媒の分
散度と固定度も扁くなるので、触媒作用が良好となる。The formation of fine irregularities by the protrusions I5 increases the surface area of the filter and increases the amount of catalyst supported. Furthermore, the degree of dispersion and fixation of the catalyst is also reduced, resulting in better catalytic action.
触媒I7は、スパッタリング法や電気メツキ法あるいは
無電解メツキ法等で突起15に付着させることによって
、フィルタ1に担持させる。触媒としては、パティキュ
レートの着火と燃焼を促進し、CO,HCの酸化除去、
及びHCとパティキュレートによるNOxの還元を、比
較的低温度で促進させる触媒特性を有するものを用いる
のが好ましい。特に、Pt、 Pd、 I?h等のpt
族元素が好ましく、それらを混合して用いてもよい。ま
た、それらの元素に加えてAu又はAgを担持させるこ
ともできる。さらに、無電解メンキ法によれば、Co−
Fe 、 Co−Ni−Mn−Re、N1−Co−P
、 N1−Fe−P等の合金やアモルファス合金も、触
媒として担持させることができる。The catalyst I7 is supported on the filter 1 by being attached to the projections 15 by sputtering, electroplating, electroless plating, or the like. As a catalyst, it promotes the ignition and combustion of particulates, oxidizes and removes CO and HC,
It is also preferable to use a catalyst having catalytic properties that promotes the reduction of NOx by HC and particulates at a relatively low temperature. In particular, Pt, Pd, I? pt of h etc.
Group elements are preferred, and a mixture of them may be used. Moreover, in addition to those elements, Au or Ag can also be supported. Furthermore, according to the electroless Menki method, Co-
Fe, Co-Ni-Mn-Re, N1-Co-P
, N1-Fe-P and other alloys and amorphous alloys can also be supported as catalysts.
次に作用を説明する。第1図に矢印で示しであるように
、排気通路の上流側から下流側へパティキュレート等の
微粒子やHC,NOx 、 GO等の有害ガス成分を含
む気体を流すと、気体がフィルタ1内を内周側から外周
側へ通過する間に微粒子がフィルタによって捕捉される
。微粒子がしだいに堆積してくると、隣り合う電極2.
2間に電圧をかけておくことにより、微粒子を介して導
通が起こり、その電流によって発生する熱で微粒子は焼
却される。この後、微粒子の焼却により導通は断たれ、
電流による熱の発生も停止する。上記作用と同時に、フ
ィルタ1に担持された触媒によって微粒子の燃焼が促進
され、HC,NOx 、 Coも浄化される。Next, the effect will be explained. As shown by the arrow in FIG. 1, when gas containing particulates such as particulates and harmful gas components such as HC, NOx, and GO flows from the upstream side to the downstream side of the exhaust passage, the gas flows inside the filter 1. Fine particles are captured by the filter while passing from the inner circumferential side to the outer circumferential side. As the particles gradually accumulate, the adjacent electrodes 2.
By applying a voltage between the two, conduction occurs through the particles, and the heat generated by the current incinerates the particles. After this, the conduction is cut off due to the incineration of the fine particles,
The generation of heat due to the electric current also stops. At the same time as the above action, the combustion of particulates is promoted by the catalyst supported on the filter 1, and HC, NOx, and Co are also purified.
本発明では、フィルタ1と電極2を交互に積層したこと
により、電極2がフィルタ1の入口面から出口面にかけ
て貫通しているので、微粒子がフィルタのどの部分に堆
積しても、微粒子を介しての導通、それによる微粒子の
焼却が実現される。In the present invention, the filters 1 and electrodes 2 are stacked alternately, so that the electrodes 2 penetrate the filter 1 from the inlet face to the outlet face, so that no matter where particulates accumulate on the filter, no particulate matter is deposited through the particulates. conduction, thereby incinerating fine particles.
それと同時に各フィルタの接触担持表面にはエツチング
により微細な凹凸が形成されているので、排ガスとの接
触面積が大きく、排ガス浄化特性が向上している。At the same time, fine irregularities are formed on the contact supporting surface of each filter by etching, so that the contact area with exhaust gas is large and the exhaust gas purification characteristics are improved.
なお、第1図において、排気通路を前記実施例とは逆の
方向にしても良い。その場合、気体はフィルタl内を外
周側から内周側へ通過するが、作用効果は上述のものと
同様である。In addition, in FIG. 1, the exhaust passage may be oriented in the opposite direction to that in the above embodiment. In that case, the gas passes through the filter l from the outer circumferential side to the inner circumferential side, but the effect is the same as that described above.
第4図は、本発明の他の実施例による排ガス浄化装置を
示す。この場合、一端を封じ側壁のフィルタに相当する
位置に小穴10をあけた耐熱性のセラミック管9を中心
にして、フィルタ1と電極2を積み上げ、積層状にして
いる。このようにすることによって、より高温の排ガス
を適用することができる。また装置全体の強度も高まる
。FIG. 4 shows an exhaust gas purification device according to another embodiment of the present invention. In this case, the filter 1 and the electrode 2 are stacked on top of each other, centering around a heat-resistant ceramic tube 9 with one end sealed and a small hole 10 formed in the side wall at a position corresponding to the filter. By doing so, higher temperature exhaust gas can be applied. It also increases the strength of the entire device.
本発明を以下の実施例によりさらに詳細に説明する。The present invention will be explained in further detail by the following examples.
実】l随1
第4図に示す装置において、フィルタ1として、ムライ
トを厚さ11II11のドーナツ状に成形したものを用
いた。成形後、スパッタリング装置内にフィルタを基板
としてセットし、1.OX 102Torrの0□分圧
を有する雰囲気中で、出力200−の高周波電力を用い
て、30分間プラズマエツチング処理を行った。処理後
、フィルタの内外周の表面に、平均直径が約0.1uH
Iの突起が形成された。In the apparatus shown in FIG. 4, a filter 1 made of mullite formed into a donut shape with a thickness of 11II11 was used. After molding, the filter is set as a substrate in a sputtering device, and 1. Plasma etching treatment was performed for 30 minutes using high frequency power with an output of 200 - in an atmosphere having a partial pressure of 0□ of OX 102 Torr. After treatment, the average diameter is about 0.1uH on the inner and outer surfaces of the filter.
A protrusion of I was formed.
次いで、フィルタを約3.5rpmの速度で回転させな
がら、ptのスパッタリングを行い、フィルタ表面の突
起上に、平均膜厚20〜30人のptを担持させた。Next, sputtering of PT was performed while rotating the filter at a speed of about 3.5 rpm, so that PT with an average thickness of 20 to 30 was supported on the protrusions on the filter surface.
電極2は、接地電極として第2図の23で示す金網状で
銅製のものを、また非接地電極として第2図の20で示
す平板状でステンレス鋼製のものを、共に厚さ1m++
にして用いた。セラミック管9はコージェライトから作
成した。The electrode 2 has a wire mesh shape and is made of copper as shown by 23 in FIG. 2 as a ground electrode, and a flat plate shape and made of stainless steel as shown as 20 in FIG. 2 as a non-ground electrode, both of which have a thickness of 1 m++.
It was used as Ceramic tube 9 was made from cordierite.
これらの部材を用いて組み立てた排ガス浄化装置を、3
■/分のパティキュレートを発生するディーゼルエンジ
ンの排気通路の途中に設置した。The exhaust gas purification device assembled using these parts is
■It was installed in the middle of the exhaust passage of a diesel engine that generates particulates per minute.
エンジンの運転中、電極間に35Vの直流電圧をパルス
状に印加して、ハウジング5の入口と出口での排ガスの
圧力差(圧力損失)を測定した。電流が一定の最大値に
達すると同時にパティキュレートの燃焼が起きて、その
直後に電流値が降下するので、そのときの最大圧力損失
を検出した。その結果を第1表に示す。During operation of the engine, a DC voltage of 35 V was applied in pulses between the electrodes, and the pressure difference (pressure loss) of the exhaust gas at the inlet and outlet of the housing 5 was measured. Combustion of particulates occurred at the same time as the current reached a certain maximum value, and the current value dropped immediately after that, so the maximum pressure loss at that time was detected. The results are shown in Table 1.
それと同時に、排ガス温度が250°Cのときに、浄化
装置の入口と出口での排ガス中のCO及び肛の濃度を連
続的に分析した。その結果を第1表に合わせて示す。At the same time, when the exhaust gas temperature was 250°C, the concentration of CO in the exhaust gas and the exhaust gas at the inlet and outlet of the purifier were continuously analyzed. The results are also shown in Table 1.
夫施撚I
実施例1と同様にしてフィルタをプラズマエツチング処
理した後、無電解メツキ法により、フィルタ表面の突起
上に、平均膜厚20人のPdを担持させた。Twisting I After the filter was subjected to plasma etching treatment in the same manner as in Example 1, Pd with an average thickness of 20 mm was supported on the protrusions on the filter surface by electroless plating.
このフィルタを用いた浄化装置で、実施例1と同様にし
て、排ガスの圧力損失と、排ガス中のCO及びICの濃
度を分析した。その結果を第1表に合わせて示す。Using a purifier using this filter, the pressure loss of the exhaust gas and the concentrations of CO and IC in the exhaust gas were analyzed in the same manner as in Example 1. The results are also shown in Table 1.
止較勇上ニュ
比較例1:実施例1と同様のムライト製のフィルタであ
るが、触媒の担持は行わないフィルタ。Comparative Example 1: A filter made of mullite similar to Example 1, but without catalyst support.
比較例2:実施例1と同様のムライト製のフィルタであ
るが、エツチング処理を行わずに、ptをスパッタリン
グにより表面に担持させたフィルタ。Comparative Example 2: A mullite filter similar to Example 1, but with PT supported on the surface by sputtering without etching.
比較例3:実施例1と同様のムライト製のフィルタであ
るが、エツチング処理を行わずに、Pdを無電解メ・7
キ法により表面に担持させたフィルタ。Comparative Example 3: A filter made of mullite similar to that of Example 1, but without etching, Pd was coated with an electroless method.
A filter supported on the surface using the Ki method.
以上の比較例1〜3のフィルタを用いた浄化装置をそれ
ぞれ組立て、実施例1と同様にして、排ガスの圧力損失
と、排ガス中のCO及びHCの濃度を分析した。その結
果を第1表に合わせて示す。Purifiers using the filters of Comparative Examples 1 to 3 above were assembled, and the pressure loss of the exhaust gas and the concentrations of CO and HC in the exhaust gas were analyzed in the same manner as in Example 1. The results are also shown in Table 1.
第 1 表
第1表に示された通り、実施例1及び2の排ガス浄化装
置を用いた場合、比較例よりも圧力損失が小さく、パテ
ィキュレートの焼却が効果的に行われたことがわかる。Table 1 As shown in Table 1, it can be seen that when the exhaust gas purification devices of Examples 1 and 2 were used, the pressure loss was smaller than that of the comparative example, and particulates were effectively incinerated.
また、COとHCの浄化も高い効率で行われた。In addition, CO and HC purification was performed with high efficiency.
以上説明した通り、本発明の排ガス浄化装置は、排ガス
中のパティキュレート等の燃焼性微粒子の捕捉と焼却を
随時行ない、しかも微粒子の焼却がフィルタ全域で可能
なので、フィルタを目詰まりさせることなく効率良く再
生することができる。As explained above, the exhaust gas purification device of the present invention captures and incinerates combustible particulates such as particulates in the exhaust gas at any time, and incineration of particulates is possible over the entire filter area, so it is efficient without clogging the filter. It can be played well.
またフィルタ内に触媒が高濃度に担持されているので、
パティキュレートの着火性が高まり、NOx 、 HC
,Co等の有害ガス成分も同時に浄化される。In addition, since the catalyst is supported in the filter at a high concentration,
The ignitability of particulates increases, reducing NOx and HC.
, Co and other harmful gas components are also purified at the same time.
第1図は本発明の一実施例による排ガス浄化装置を示す
断面図であり、
第2図は本発明の排ガス浄化装置に用いるフィルタ及び
電極の例を示す斜視図であり、第3図は触媒を担持した
フィルタ表面の状態を示す拡大断面図であり、
第4図は本発明の他の実施例による排ガス浄化装置を示
す断面図であり、
第5図、第6図および第7図はそれぞれ従来の排ガス浄
化装置を示す断面図である。
1・ ・ ・フィルタ
2・・・電極
3・・・排気通路
5・・・ハウジング
7・・・接地電極
8・・・非接地電極
9・・・セラミック管
15・・・突起
17・・・触媒
出 願 人 工業技術院長 杉 浦 賢株式会社リ
ケン
復代理人 弁理士 高 石 橘 馬第5図
電源へ
第4図
@現へFIG. 1 is a cross-sectional view showing an exhaust gas purification device according to an embodiment of the present invention, FIG. 2 is a perspective view showing an example of a filter and an electrode used in the exhaust gas purification device of the present invention, and FIG. FIG. 4 is an enlarged cross-sectional view showing the state of the filter surface supporting the present invention; FIG. 4 is a cross-sectional view showing an exhaust gas purification device according to another embodiment of the present invention; FIGS. 5, 6, and 7 are respectively FIG. 2 is a sectional view showing a conventional exhaust gas purification device. 1. Filter 2... Electrode 3... Exhaust passage 5... Housing 7... Grounded electrode 8... Non-grounded electrode 9... Ceramic tube 15... Protrusion 17... Catalyst Applicant: Director of the Agency of Industrial Science and Technology Ken Sugiura Sub-agent of Riken Co., Ltd. Patent attorney Takaishi Tachibana Ma To Figure 5 Power Supply Figure 4 @ Present
Claims (4)
浮遊する微粒子を捕捉するフィルタと、前記フィルタと
交互に積層された電極とを有し、隣接する電極間に電圧
をかけておくことにより、前記フィルタに電気伝導性か
つ燃焼性の微粒子が捕捉されると、通電により加熱され
てフィルタ内で随時焼却される排ガス浄化装置において
、エッチング処理により微細な凹凸が形成された前記フ
ィルタの表面に触媒が担持されていることを特徴とする
排ガス浄化装置。(1) It has a filter made of a nonflammable and electrically insulating material that captures particulates floating in exhaust gas, and electrodes stacked alternately with the filter, and a voltage is applied between adjacent electrodes. When electrically conductive and combustible particulates are captured by the filter, they are heated by electricity and incinerated at any time within the filter. An exhaust gas purification device characterized by having a catalyst supported on it.
フィルタ内での排ガスの流れ方向が、前記フィルタと前
記電極の積層面に平行となることを特徴とする排ガス浄
化装置。(2) The exhaust gas purification device according to claim 1, wherein the flow direction of the exhaust gas within the filter is parallel to a laminated surface of the filter and the electrode.
、前記フィルタと前記電極は、ともに中空円板型の形状
を有することを特徴とする排ガス浄化装置。(3) The exhaust gas purification device according to claim 1 or 2, wherein both the filter and the electrode have a hollow disk shape.
中空の部分にセラミック管が挿入されていることを特徴
とする排ガス浄化装置。(4) The exhaust gas purification device according to claim 3, wherein a ceramic tube is inserted into the hollow portion.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2105022A JPH045414A (en) | 1990-04-20 | 1990-04-20 | Exhaust gas purifying device |
US07/560,556 US5141714A (en) | 1989-08-01 | 1990-07-31 | Exhaust gas cleaner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2105022A JPH045414A (en) | 1990-04-20 | 1990-04-20 | Exhaust gas purifying device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH045414A true JPH045414A (en) | 1992-01-09 |
Family
ID=14396431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2105022A Pending JPH045414A (en) | 1989-08-01 | 1990-04-20 | Exhaust gas purifying device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH045414A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003103130A (en) * | 2001-09-28 | 2003-04-08 | Nippon Kouatsu Electric Co | Method and apparatus for removing particulate matter |
KR100503127B1 (en) * | 1996-10-30 | 2005-09-26 | 어플라이드 머티어리얼스, 인코포레이티드 | Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment |
US7211227B2 (en) | 2002-03-19 | 2007-05-01 | Hyundai Motor Company | Plasma reactor, production method thereof, and emission control apparatus of a vehicle |
-
1990
- 1990-04-20 JP JP2105022A patent/JPH045414A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100503127B1 (en) * | 1996-10-30 | 2005-09-26 | 어플라이드 머티어리얼스, 인코포레이티드 | Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment |
JP2003103130A (en) * | 2001-09-28 | 2003-04-08 | Nippon Kouatsu Electric Co | Method and apparatus for removing particulate matter |
US7211227B2 (en) | 2002-03-19 | 2007-05-01 | Hyundai Motor Company | Plasma reactor, production method thereof, and emission control apparatus of a vehicle |
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