JPH0453068U - - Google Patents
Info
- Publication number
- JPH0453068U JPH0453068U JP9275290U JP9275290U JPH0453068U JP H0453068 U JPH0453068 U JP H0453068U JP 9275290 U JP9275290 U JP 9275290U JP 9275290 U JP9275290 U JP 9275290U JP H0453068 U JPH0453068 U JP H0453068U
- Authority
- JP
- Japan
- Prior art keywords
- power
- molecular beam
- source
- power supply
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9275290U JPH0453068U (sv) | 1990-09-05 | 1990-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9275290U JPH0453068U (sv) | 1990-09-05 | 1990-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453068U true JPH0453068U (sv) | 1992-05-06 |
Family
ID=31829451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9275290U Pending JPH0453068U (sv) | 1990-09-05 | 1990-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453068U (sv) |
-
1990
- 1990-09-05 JP JP9275290U patent/JPH0453068U/ja active Pending