JPH0453053U - - Google Patents
Info
- Publication number
- JPH0453053U JPH0453053U JP9665590U JP9665590U JPH0453053U JP H0453053 U JPH0453053 U JP H0453053U JP 9665590 U JP9665590 U JP 9665590U JP 9665590 U JP9665590 U JP 9665590U JP H0453053 U JPH0453053 U JP H0453053U
- Authority
- JP
- Japan
- Prior art keywords
- rotating body
- cage
- thin film
- vacuum container
- film deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003756 stirring Methods 0.000 claims description 4
- 238000000427 thin-film deposition Methods 0.000 claims 5
- 239000010409 thin film Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9665590U JPH0453053U (enExample) | 1990-09-14 | 1990-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9665590U JPH0453053U (enExample) | 1990-09-14 | 1990-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453053U true JPH0453053U (enExample) | 1992-05-06 |
Family
ID=31836362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9665590U Pending JPH0453053U (enExample) | 1990-09-14 | 1990-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453053U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5635765A (en) * | 1979-08-31 | 1981-04-08 | Seiko Instr & Electronics Ltd | Ion plating apparatus for microparts |
-
1990
- 1990-09-14 JP JP9665590U patent/JPH0453053U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5635765A (en) * | 1979-08-31 | 1981-04-08 | Seiko Instr & Electronics Ltd | Ion plating apparatus for microparts |