JPH0453052U - - Google Patents
Info
- Publication number
- JPH0453052U JPH0453052U JP9426990U JP9426990U JPH0453052U JP H0453052 U JPH0453052 U JP H0453052U JP 9426990 U JP9426990 U JP 9426990U JP 9426990 U JP9426990 U JP 9426990U JP H0453052 U JPH0453052 U JP H0453052U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- evaporation
- melting
- source crucible
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 17
- 230000008020 evaporation Effects 0.000 claims description 16
- 238000002844 melting Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9426990U JPH0453052U (OSRAM) | 1990-09-06 | 1990-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9426990U JPH0453052U (OSRAM) | 1990-09-06 | 1990-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453052U true JPH0453052U (OSRAM) | 1992-05-06 |
Family
ID=31832090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9426990U Pending JPH0453052U (OSRAM) | 1990-09-06 | 1990-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453052U (OSRAM) |
-
1990
- 1990-09-06 JP JP9426990U patent/JPH0453052U/ja active Pending