JPH0453051U - - Google Patents
Info
- Publication number
- JPH0453051U JPH0453051U JP9153390U JP9153390U JPH0453051U JP H0453051 U JPH0453051 U JP H0453051U JP 9153390 U JP9153390 U JP 9153390U JP 9153390 U JP9153390 U JP 9153390U JP H0453051 U JPH0453051 U JP H0453051U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- heater wire
- lids
- mouth
- lid provided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9153390U JPH0453051U (ko) | 1990-09-03 | 1990-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9153390U JPH0453051U (ko) | 1990-09-03 | 1990-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453051U true JPH0453051U (ko) | 1992-05-06 |
Family
ID=31827264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9153390U Pending JPH0453051U (ko) | 1990-09-03 | 1990-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453051U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006009134A (ja) * | 2003-07-31 | 2006-01-12 | Semiconductor Energy Lab Co Ltd | 製造装置 |
-
1990
- 1990-09-03 JP JP9153390U patent/JPH0453051U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006009134A (ja) * | 2003-07-31 | 2006-01-12 | Semiconductor Energy Lab Co Ltd | 製造装置 |
| JP4578872B2 (ja) * | 2003-07-31 | 2010-11-10 | 株式会社半導体エネルギー研究所 | 容器および蒸着装置 |