JPH0452733U - - Google Patents
Info
- Publication number
- JPH0452733U JPH0452733U JP9539590U JP9539590U JPH0452733U JP H0452733 U JPH0452733 U JP H0452733U JP 9539590 U JP9539590 U JP 9539590U JP 9539590 U JP9539590 U JP 9539590U JP H0452733 U JPH0452733 U JP H0452733U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9539590U JPH0452733U (cs) | 1990-09-10 | 1990-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9539590U JPH0452733U (cs) | 1990-09-10 | 1990-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0452733U true JPH0452733U (cs) | 1992-05-06 |
Family
ID=31834085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9539590U Pending JPH0452733U (cs) | 1990-09-10 | 1990-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452733U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012028737A (ja) * | 2010-06-22 | 2012-02-09 | Nuflare Technology Inc | 半導体製造装置、半導体製造方法及び半導体製造装置のクリーニング方法 |
-
1990
- 1990-09-10 JP JP9539590U patent/JPH0452733U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012028737A (ja) * | 2010-06-22 | 2012-02-09 | Nuflare Technology Inc | 半導体製造装置、半導体製造方法及び半導体製造装置のクリーニング方法 |