JPH0451138U

JPH0451138U -

Info

Publication number: JPH0451138U
Application number: JP9305790U
Authority: JP
Priority date: 1990-09-04
Filing date: 1990-09-04
Publication date: 1992-04-30

Description

[Brief explanation of the drawing]

第１図は実施例の正面図、第２図は第１図の
−断面図である。１……板状基板、３ａ，３ｂ……カセツト、４
……テーブル、５……リフタ、７……搬送手段、
８……レール、９……台座、１０……ガイド、１
１……保持具、１２……コイルばね。 FIG. 1 is a front view of the embodiment, and FIG. 2 is a cross-sectional view taken from FIG. 1. 1... Plate substrate, 3a, 3b... Cassette, 4
... table, 5 ... lifter, 7 ... conveyance means,
8...Rail, 9...Pedestal, 10...Guide, 1
1... Holder, 12... Coil spring.

Claims

[Claims for Utility Model Registration] 1. A table on which a pair of cassettes are placed, a plurality of pairs of holders arranged above the table and capable of holding the outer periphery of a plate-shaped substrate, and a sliding movement of the holders in the thickness direction of the plate. a variable pitch means for changing the pitch of each of the holders at equal pitches; and a conveyance means for moving the plurality of pairs of holders between the pair of cassettes. Transfer equipment between cassettes. 2. The device for transferring plate-shaped substrates between cassettes according to claim 1, wherein the table is provided with a lift that vertically passes through the cassettes and moves up and down while holding the plate-shaped substrates. Transfer device between cassettes. 3. The device for transferring between cassettes of plate-like substrates according to claim 1 or 2, wherein the variable pitch means engages with the holder and connects a coil spring parallel to the guide and one end of the coil spring. A device for transferring plate-like substrates between cassettes, characterized by comprising a linear motion mechanism that expands and contracts. 4. The device for transferring plate-shaped substrates between cassettes according to claim 1 or 2, wherein the variable pitch means includes a cylindrical groove cam that engages with the holder and is parallel to the guide, and a cylindrical groove cam that is parallel to the guide. 1. A transfer device between cassettes of plate-like substrates, characterized by comprising a rotational movement mechanism for rotating plate-like substrates.