JPH0450758U - - Google Patents
Info
- Publication number
- JPH0450758U JPH0450758U JP9417690U JP9417690U JPH0450758U JP H0450758 U JPH0450758 U JP H0450758U JP 9417690 U JP9417690 U JP 9417690U JP 9417690 U JP9417690 U JP 9417690U JP H0450758 U JPH0450758 U JP H0450758U
- Authority
- JP
- Japan
- Prior art keywords
- silicon diaphragm
- spiral ripples
- spiral
- emanating
- stripes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
Description
第１図、第３図は、本考案に係るシリコンダイ
ヤフラムの各実施例の平面図、第２図は第１図の
断面図、第４図は従来例の平面図である。
Ｐ……渦巻状波紋、Ｐ１，Ｐ２……円形波紋、
Ｄ……ダイヤフラム。
1 and 3 are plan views of each embodiment of the silicon diaphragm according to the present invention, FIG. 2 is a sectional view of FIG. 1, and FIG. 4 is a plan view of a conventional example. P...Spiral ripples, P1 , P2 ...Circular ripples,
D...Diaphragm.
Claims (1)
分は平らに形成して成るシリコンダイヤフラム。 (2) 上記渦巻状波紋は、周方向等分位置から発
した複数条であることを特徴とする請求項(1)記
載のシリコンダイヤフラム。[Claims for Utility Model Registration] (1) A silicon diaphragm with spiral ripples formed on the periphery and a flat central portion. (2) The silicon diaphragm according to claim (1), wherein the spiral ripples are a plurality of stripes emanating from equally spaced positions in the circumferential direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9417690U JPH0450758U (en) | 1990-09-06 | 1990-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9417690U JPH0450758U (en) | 1990-09-06 | 1990-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0450758U true JPH0450758U (en) | 1992-04-28 |
Family
ID=31831925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9417690U Pending JPH0450758U (en) | 1990-09-06 | 1990-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0450758U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5718719A (en) * | 1980-07-07 | 1982-01-30 | Hitachi Ltd | Preparation of polyurethane foam |
| JPH0251664A (en) * | 1988-04-21 | 1990-02-21 | Tatsuta Electric Wire & Cable Co Ltd | Diaphragm |
-
1990
- 1990-09-06 JP JP9417690U patent/JPH0450758U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5718719A (en) * | 1980-07-07 | 1982-01-30 | Hitachi Ltd | Preparation of polyurethane foam |
| JPH0251664A (en) * | 1988-04-21 | 1990-02-21 | Tatsuta Electric Wire & Cable Co Ltd | Diaphragm |