JPH0447641U - - Google Patents

Info

Publication number
JPH0447641U
JPH0447641U JP8854590U JP8854590U JPH0447641U JP H0447641 U JPH0447641 U JP H0447641U JP 8854590 U JP8854590 U JP 8854590U JP 8854590 U JP8854590 U JP 8854590U JP H0447641 U JPH0447641 U JP H0447641U
Authority
JP
Japan
Prior art keywords
pressure
pedestal
thick film
zirconia substrate
pressure impulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8854590U
Other languages
English (en)
Japanese (ja)
Other versions
JP2547950Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990088545U priority Critical patent/JP2547950Y2/ja
Publication of JPH0447641U publication Critical patent/JPH0447641U/ja
Application granted granted Critical
Publication of JP2547950Y2 publication Critical patent/JP2547950Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1990088545U 1990-08-24 1990-08-24 厚膜圧力センサ Expired - Fee Related JP2547950Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990088545U JP2547950Y2 (ja) 1990-08-24 1990-08-24 厚膜圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990088545U JP2547950Y2 (ja) 1990-08-24 1990-08-24 厚膜圧力センサ

Publications (2)

Publication Number Publication Date
JPH0447641U true JPH0447641U (US20100012521A1-20100121-C00001.png) 1992-04-22
JP2547950Y2 JP2547950Y2 (ja) 1997-09-17

Family

ID=31821848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990088545U Expired - Fee Related JP2547950Y2 (ja) 1990-08-24 1990-08-24 厚膜圧力センサ

Country Status (1)

Country Link
JP (1) JP2547950Y2 (US20100012521A1-20100121-C00001.png)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079242A (ja) * 1983-10-07 1985-05-07 Hitachi Ltd 圧力変換器
JPS60185129A (ja) * 1984-03-03 1985-09-20 Aisin Seiki Co Ltd 圧力センサ
JPS60253280A (ja) * 1984-05-29 1985-12-13 Omron Tateisi Electronics Co 半導体圧力センサ
JPS6421331A (en) * 1987-07-17 1989-01-24 Jgc Corp Pressure sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079242A (ja) * 1983-10-07 1985-05-07 Hitachi Ltd 圧力変換器
JPS60185129A (ja) * 1984-03-03 1985-09-20 Aisin Seiki Co Ltd 圧力センサ
JPS60253280A (ja) * 1984-05-29 1985-12-13 Omron Tateisi Electronics Co 半導体圧力センサ
JPS6421331A (en) * 1987-07-17 1989-01-24 Jgc Corp Pressure sensor

Also Published As

Publication number Publication date
JP2547950Y2 (ja) 1997-09-17

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees