JPH044739U - - Google Patents
Info
- Publication number
- JPH044739U JPH044739U JP4489390U JP4489390U JPH044739U JP H044739 U JPH044739 U JP H044739U JP 4489390 U JP4489390 U JP 4489390U JP 4489390 U JP4489390 U JP 4489390U JP H044739 U JPH044739 U JP H044739U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- transfer chamber
- dry etching
- semiconductor wafers
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4489390U JPH044739U (en:Method) | 1990-04-25 | 1990-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4489390U JPH044739U (en:Method) | 1990-04-25 | 1990-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH044739U true JPH044739U (en:Method) | 1992-01-16 |
Family
ID=31558597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4489390U Pending JPH044739U (en:Method) | 1990-04-25 | 1990-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044739U (en:Method) |
-
1990
- 1990-04-25 JP JP4489390U patent/JPH044739U/ja active Pending