JPH0446540U - - Google Patents

Info

Publication number
JPH0446540U
JPH0446540U JP8928590U JP8928590U JPH0446540U JP H0446540 U JPH0446540 U JP H0446540U JP 8928590 U JP8928590 U JP 8928590U JP 8928590 U JP8928590 U JP 8928590U JP H0446540 U JPH0446540 U JP H0446540U
Authority
JP
Japan
Prior art keywords
oil passage
oil
wafer processing
wafer
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8928590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8928590U priority Critical patent/JPH0446540U/ja
Publication of JPH0446540U publication Critical patent/JPH0446540U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
JP8928590U 1990-08-27 1990-08-27 Pending JPH0446540U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8928590U JPH0446540U (US20090163788A1-20090625-C00002.png) 1990-08-27 1990-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8928590U JPH0446540U (US20090163788A1-20090625-C00002.png) 1990-08-27 1990-08-27

Publications (1)

Publication Number Publication Date
JPH0446540U true JPH0446540U (US20090163788A1-20090625-C00002.png) 1992-04-21

Family

ID=31823163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8928590U Pending JPH0446540U (US20090163788A1-20090625-C00002.png) 1990-08-27 1990-08-27

Country Status (1)

Country Link
JP (1) JPH0446540U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006156830A (ja) * 2004-11-30 2006-06-15 Mitsubishi Heavy Ind Ltd 製膜装置及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006156830A (ja) * 2004-11-30 2006-06-15 Mitsubishi Heavy Ind Ltd 製膜装置及びその製造方法
JP4533732B2 (ja) * 2004-11-30 2010-09-01 三菱重工業株式会社 製膜装置及びその製造方法

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