JPH0444360U - - Google Patents
Info
- Publication number
- JPH0444360U JPH0444360U JP8643790U JP8643790U JPH0444360U JP H0444360 U JPH0444360 U JP H0444360U JP 8643790 U JP8643790 U JP 8643790U JP 8643790 U JP8643790 U JP 8643790U JP H0444360 U JPH0444360 U JP H0444360U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- lid
- cell
- film formation
- mouth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8643790U JPH0444360U (fr) | 1990-08-20 | 1990-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8643790U JPH0444360U (fr) | 1990-08-20 | 1990-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0444360U true JPH0444360U (fr) | 1992-04-15 |
Family
ID=31818103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8643790U Pending JPH0444360U (fr) | 1990-08-20 | 1990-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444360U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008261056A (ja) * | 2003-08-04 | 2008-10-30 | Lg Display Co Ltd | 有機電界発光層の蒸着源 |
| JP2013012543A (ja) * | 2011-06-28 | 2013-01-17 | Fujitsu Ltd | 分子線結晶成長装置及び半導体装置の製造方法 |
-
1990
- 1990-08-20 JP JP8643790U patent/JPH0444360U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008261056A (ja) * | 2003-08-04 | 2008-10-30 | Lg Display Co Ltd | 有機電界発光層の蒸着源 |
| JP2013012543A (ja) * | 2011-06-28 | 2013-01-17 | Fujitsu Ltd | 分子線結晶成長装置及び半導体装置の製造方法 |