JPH044370A - Valve - Google Patents

Abstract

PURPOSE:To obtain a valve capable of operating stably for a long period even at a high temperature, by inserting a valve piece in the penetration hole of a main body or the like in a free condition, and operating to open and close the valve by a pair of pressing members provided at the outer side of diaphragms. CONSTITUTION:The liquid contact surfaces 11 (11-1 and 11-2) of a main body are formed of an oxide, and diaphragms 30 (30-1 and 30-2) are formed of a fluorine type heatproof rubber, a valve piece 20 which consists of an oxide is inserted in to an aperture 13a and a penetration hole 18 of the main body 10, and a valve is formed to be opened and closed by a pair of pressing members provided at the outer side of the diaphragms 30-1 and 30-2, and further more, adhesion preventive members 40-1 and 40-2 are placed between the both members 11-1, 30-1 and 11-2, 30-2, to compose the system. As a result the valve can bear even at a temperature 280 deg.C or higher, and a perfect cutoff and secure feeding with no leakage can be secured stably for a long period. And furthermore, the mechanical strength and the durability are increased, the han dling is made easier, and the automation can be also realized.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a valve. In particular, it is used for supplying and shutting off high-temperature scum, etc. in semiconductor manufacturing processes.

[Prior Art] For example, FIGS. 6 and 7 show valves used for supplying and shutting off various fluids in semiconductor manufacturing equipment using M-CVD and MO-CVD methods.

FIG. 6 shows the inflow channel 12. A bellows 39 (45 is a cover) that forms a sealed space S that communicates both passages 12 and 13 between the main body 10 having an outflow passage 13, the valve piece 20, and the liquid contact surface 11 of the main body 1o. , valve piece 20
Fig. 7 shows a so-called bellows seal type valve consisting of an operating rod 25 and a main body 1.0 (12, 13>).
Two chips embedded in the liquid contact surface 11 of this main body 10,
A diaphragm 3 that forms a sealed space S between it and the liquid contact surface 11, and also forms a part of the sealed space S as a valve piece (2o).
9 and an operating rod 25, a so-called diaphragm type valve is shown.

Therefore, in either type, the inflow path 12 and the outflow path 13 can be connected and isolated via the sealed space S by moving the operating rod 25 up and down.

Incidentally, the main body 10 of the valve is generally made of metal such as 5US316, and the valve piece 20 is made of Teflon resin or the like.

However, for example, M-CVD methods that use mercury etc. are only allowed to use metals, and in recent years, even higher corrosion resistance and heat resistance are required due to the relationship with vapor pressure. It has been pointed out that the MO-CVD method apparatus for producing compounds tends to use oxygen at a higher temperature (for example, 250 to 280° C.), and therefore a valve with the above structure cannot withstand use. Furthermore, a diaphragm made of a Teflon-based resin or the like that is not only heat resistant cannot be used in MO-CVD apparatuses in particular where contamination with seed dregs is disliked due to its permeability to scum.

On the other hand, it may be possible to use heat-resistant rubber that is not permeable to debris, but in this case, thermal deformation may occur, and furthermore, it may remain stuck to the liquid contact surface 11 of the main body 10 when the temperature is returned to room temperature. There is a problem with this.

For example, when using high-temperature scraps of 250°C or higher, the main body 10. A manual cock type as shown in Fig. 8 where the valve piece 20 is made of quartz or heat-resistant glass! The actual situation is that M-made valves are used.

[Problems to be Solved by the Invention] However, in the case of the manual cock type described above, since the main body 10 and the valve piece 20 have a tapered sliding structure, it lacks complete fluid isolation, and the tightening angle of the handle 26 and There are problems in that leaks occur due to changes over time, mechanical strength and reliability are low, and automatic operation is difficult during high-temperature use.

An object of the present invention is to provide a valve that can stably guarantee accurate supply of fluid and complete shutoff with no leakage over a long period of time even at high temperatures.

[Means for Solving the Problems] The present invention provides a main body having an inflow path and an outflow path and facing liquid contact surfaces on both sides, and a through hole for fitting a valve piece made of an oxide such as quartz. In addition, at least the direct liquid surface is formed of an oxide such as quartz, and a pair of diaphragms made of fluorine-based heat-resistant rubber are provided to form sealed spaces between each wetted surface, and in contact with the diaphragm within each sealed space. An anti-stick member made of oxide such as quartz is provided on each diaphragm to prevent direct contact with the liquid surface, and a pair of suppressing members for opening and closing the valve piece is provided on the outside of each diaphragm. It is characterized by

[Function 1] In the present invention, at least the liquid contact surface of the main body is made of an oxide such as quartz, the valve piece is made of an oxide such as quartz, and the diaphragm is also made of a fluorine-based heat-resistant rubber that is not permeable to scum. Therefore, it can be used reliably even at high temperatures of, for example, 280°C or higher.

In addition, the valve piece is inserted into the through hole of the main body and is opened and closed via each diaphragm by the suppressing members disposed on both sides sandwiching the main body, so the form of the diaphragm is simplified, ensuring stable operation, and pressing. There is no need to penetrate the diaphragm between the member and the valve piece via an O-ring or the like, resulting in high reliability.

Furthermore, since an anti-adhesion member is interposed between the diaphragm and the liquid contact surface, it is stable even if the usage environment changes from high temperature to room temperature, preventing the diaphragm from sticking to the liquid contact surface. It can be guaranteed that it will open and close properly. Furthermore, mixing of different fluids due to gas permeation can be completely prevented, and automation of valve opening and closing can be easily achieved.

"Example" Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) As shown in FIG. 1, this valve is roughly divided into main body 10
．． Valve piece 20. A pair of upper and lower diaphragms 30 (
30-1, 3O-2), a pair of upper and lower pressing members 26 (2
6-1, 26-2), each sealed space S1. ．． It is composed of the anti-adhesive member 40 (40-1, 40-2>, etc.) interposed in S2, and has a structure that can withstand use at high temperatures and allows the valve piece 20 to be opened and closed from the outside of the diaphragm 30, improving reliability. It is said that this was aimed at.

First, the main body 10 is formed from an oxide such as quartz or sapphire that can withstand high-temperature use. In this embodiment, it is made of quartz.

However, in the present invention, at least the liquid contact surface 11 may be formed of the above-mentioned quartz or the like, but it does not necessarily mean that the entire liquid contact surface 11 is formed of quartz or the like.

For example, inflow 1i412. This is the case, for example, when another material is used for the outflow passage 13 and the piping for convenience of connection thereto.

Therefore, the corrosion resistance and oxidation resistance problems caused by conventional stainless steel can be eliminated, and it can be used even at high temperatures of 280°C or higher.

Here, the main body 10 is provided with a through hole 18 that communicates with the opening 1.3a for fitting the valve piece 20, and the through hole 18 is provided on both sides (upper and lower in FIG. 1) or on the liquid contact surface 1.1 ( 11-
1,1l-2).

Next, the valve piece 20 is opened to the opening 13a.

It has a shape corresponding to the through hole 18, and is made of an oxide such as quartz like the main body 10. In this example, the valve seat surface has a tapered shape and is of a mating type.6
Additionally, a rod portion 21 extending downward is integrally molded on the valve piece 20 for convenience in opening and closing operations. Therefore, if the valve piece 20 is pressed from above in FIG. In other words, it is possible to communicate with each other. Therefore, the valve piece 20 is similar to the diaphragm 30 (described later).
30-1, 30-2> or connected to the conventional external operating rod 25 via an O-ring or the like, the structure is simple and reliability can be significantly improved.

Further, the diaphragm 30 is connected to the liquid contact surface 11-1 of the main body 10.
．． 11-2 to form a sealed space S (31, 32) that communicates the inflow passage 12 and the outflow passage 13, it is composed of a pair of upper and lower parts 30-1 and 30-2. Each of the diaphragms 30-1 and 30-2 is made of fluorine-based heat-resistant rubber that is not permeable to debris and can withstand high temperatures. In this embodiment, Kalrez (manufactured by DuPont), which can withstand use at temperatures above 280°C, is used.

The edges of each diaphragm 30-1 (30-2) are set in the upper and lower grooves 15 (15) of the main body 10, and are applied with external force via the covers 50-1 (50-2) made of thin metal plates. It is attached to the main body 10.

This cover 50-1 (50-2) has bolts 56 (
It is attached to the flange 55 (55) fixed to the flange 55 (56) via a sealing member 59 (59) by a fixed frame 58 (58) which is threadedly engaged with the flange 55 (55).

The reason why each diaphragm 3C)-1, 30-2 is provided with each cover 50-1. This is to prevent this. That is, each cover 50-1.50-2 corresponds to each diaphragm 30-1.30.
-2 movement, while preventing the diaphragm from deforming due to large pressure. Therefore, it is not necessary to make each diaphragm excessively thick, and from this point of view as well, distortion of the diaphragm can be reduced.

Here, the diaphragm type is the bellows seal type shown in FIG.
This is based on the results of the applicant's experiments and research that at 280° C., severe wear and twisting occur, and there is no practical value.

Now, in this way, at least the liquid contact surface 11-1 of the main body 10
．． 11-2 is made of quartz or the like, the valve piece 20 is made of oxide such as quartz, and the diaphragm 30 is made of quartz or the like.
(If 30-1, 30-2> are diaphragm-type valves made of fluorine-based heat-resistant rubber, they will be able to withstand use at high temperatures and will not cause the leakage of the manual cock type shown in Figure 8 above.
Defects such as lack of reliability can be eliminated. However, even this cannot be said to ensure stable use over a long period of time and adaptability to various usage conditions.

That is, diaphragm 30 (30-1, 3O-2)
Although it is heat resistant, it is made of rubber, so it deforms at high temperatures, and remains deformed even when the temperature inside the sealed space St, 82 returns to room temperature.
2 may become sticky. This can be easily understood by considering the general thermal bonding method for rubber-based materials.

Here, in the present invention, within the sealed space Sl, 82, the liquid contact surface 111.11-2 and the diaphragm 30-1.3
Anti-adhesive member 4.0-1 that can withstand high temperatures between 0-2 and 0-1.
40-2 is inserted.

In this embodiment, the anti-adhesive member 40 (40-1°40-
2> is made of quartz and has a washer shape like the liquid contact surface 11 (11, -1, 11, -2).

However, the material itself may be sapphire, heat-resistant plastic, or the like.

diaphragm 30-1.30 during high-temperature use.
-2 is deformed and the wetted surface 11-1.11. - Even if it hangs down in two directions, the wetted surface 11-1. ．． It does not directly contact 11-2, but only contacts anti-adhesion member 40-1 and 40-2. For this reason, the closed space S1. ．． Even if the temperature inside 32 drops to room temperature and the diaphragm 30-1.30-2 and the anti-adhesion member 40-1.40-2 stick together, the anti-adhesion member 40-1.40-2 and liquid contact surface 11-1.11. Since the valve piece 20 is always separable from the valve piece 20, no inconvenience occurs in the opening/closing operation of the valve piece 20.

Furthermore, in this example, we focused on the restorability of heat-resistant rubber,
Temperature detection means 60-1, 60-2 are provided.

In other words, when returning from a high temperature to room temperature, heat-resistant rubber remains deformed or stuck to other parts, but it has the property of returning to its original shape if the temperature is raised to 50 to 60 degrees Celsius. . In the case of this example (the above-mentioned Power Luretz), it deforms when the operating temperature is 150°C or higher, and if it sticks to quartz when the temperature drops to room temperature, the shape is restored by raising the temperature to 57°C, and the quartz (adhesive preventive It has been confirmed that the material peels off from the member 40-1.4O-2).

Therefore, in this embodiment, the valve, especially the sealed space St, is designed to ensure reliable operation of the - layer and expand flexibility.

Temperature detection means 60-1, 60-2 is used to introduce an interlock that does not allow operation of the operating rod 25 unless the temperature inside S2 exceeds a predetermined temperature (for example, 57° C.).
It has been established. Although the form and format of the means 60-1 and 60-2 are not limited, in this example,
It is formed from a cartridge heater embedded in each flange 55.

Next, the pair of pressing members 26-1, 26-2
It is connected to the operating rod 25 so that it can be relatively moved in the same direction (up=13-downward in FIG. 1) by the vertical movement of the control rod 5. Therefore, if the operating rod 25 is pulled down manually or automatically, the pressing member 26-1 or the cover 50-
1 through the diaphragm 30-1, the valve piece 20 can be pushed down to the state shown in FIG. 1, that is, the opening 1.3a of the outflow path 13 can be closed. On the contrary, if the operating rod 25 is pushed up, the suppressing member 26-2 pushes up the rod portion 21, so that the inflow channel 12 and the outflow channel 13 can be communicated through the sealed space S1. .

According to this first embodiment, the liquid contact surface 11 (111, 1, 1, -2) of the main body 10 is made of oxide.

The diaphragm 30 (30-1, 3O-2) is made of fluorine-based heat-resistant rubber, and the valve piece 20 made of oxide is inserted into the opening 13a of the main body 10.

Each diaphragm 30-1°30- is inserted into the through hole 18.
2, and both 11-1.30-1.1.1. -2.30
- Anti-adhesive member 40-1.40- made of oxide between
Since it is made of 'W4 structure with 2 interposed, it can withstand high temperatures of over 280℃, and can ensure complete shutoff and reliable supply without leakage over a long period of time.It also has high mechanical strength and reliability, and is easy to handle. Automatic operation is also possible.

Further, the valve piece 20 is fitted into the opening 13a and the through hole 18 in a free state. In other words, since it is not necessary to assemble the relative positions of the handle 26 and valve piece 20° and the valve piece 20 and the main body 10 with extreme precision as shown in FIG. 8, it is possible to significantly reduce costs and ensure perfect sealing. can.

Furthermore, since each diaphragm 30=1.30-2 can have a single-layer sheet structure without having to pass the operating rod (25) through an O-ring etc. as in the conventional case, processing costs are low and smooth deformation is ensured. It can operate safely over a long period of time, and since it is in surface contact with the valve piece 20, etc., further stable operation over a long period of time is guaranteed.

Further, the anti-adhesive members 40-1 and 40-2 have a washer shape, and the sealed space S1. , S2, so it is easy to assemble at low cost.

= 15- Also, the diaphragm 30-1. ．． 3 (outside of 12,
Since the metal cover 50-1, 50-2 is provided, it is possible to prevent the diaphragm 30-1 and 30-2 from being damaged due to thermal distortion while allowing the movement of the diaphragm 30-1 and 30-2. Stable operation can be guaranteed. Further, there is no need to increase the thickness of each diaphragm 30-1, 30-2 to withstand pressure, which is advantageous in terms of heat and cost.

Furthermore, since the flange 55.55 is provided with temperature detection means 60-1.60-2 for interlocking, the diaphragm 30-1.30-2 and the anti-adhesion member 40
-1.40-2, as well as the adhesion between other parts, can be removed before opening and closing the valve, making it possible to easily construct a foolproof measure.

(Second example) A second embodiment is shown in FIG.

This valve differs from the first embodiment in that the valve piece 20 is double-headed 20-1, 20-2, and has two outflow passages 13-1.
13-2 is configured to be able to switch and communicate the inflow path 12 with the inflow path 13-2. Therefore, the same structures as those in the first practical example shown in FIG.
1-1, 2l-2).

Therefore, this second embodiment has the same effects as the first embodiment, and furthermore, for example, MO-CVD
A single valve allows the process feed waste to be transferred to the reaction chamber and vented elsewhere.

In addition, in the above embodiments, the valve seat surface was of a tapered shape and the fitting method was used, or the valve piece 2
0 in the sealed space Sl in a free state and the opening 13a can be closed when the suppressing member 26-1 is pressed down from the outside of the diaphragm 30-1, the form is not limited to the above disclosed range. For example, as shown in FIGS. 3 and 4, an O-ring 2 made of heat-resistant rubber or the like is attached to the valve piece 20.
The Oa can be sealed with the liquid contact surface 11-1, or a heat-resistant O ring 10a can be provided around the periphery of the opening 13a of the main body 15 as shown in FIG. Further, modifications such as attaching a sub-piece 22 (see FIG. 4) to the lower end of the rod portion 21 for enlarging the pressing surface are also included.

In addition, in the type shown in FIG. 4, a stopper 21b is provided on the valve piece 20 in order to make the deformation of the O-ring 20a reasonable, and the rod part 21 is divided into two parts (21-1, 21 , -2).

[Effects of the Invention] According to the present invention, the main body (liquid contact surface), the valve piece, and the diaphragm are made of oxide such as quartz or fluorine-based heat-resistant rubber, and the valve piece is fitted freely into the through hole of the main body. It is formed so that it can be opened and closed by a pair of suppressing members arranged on the outside of the diaphragm, and an anti-adhesive member made of oxide is interposed in each sealed space, so it is 250 to 280 It is possible to provide a highly reliable and easy-to-handle valve that can operate stably over a long period of time, providing accurate supply and complete shutoff with no leakage, even at high temperatures of .degree. C. or higher.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view showing a first embodiment of the present invention, FIG. 2 is a longitudinal sectional view showing a second embodiment, and FIGS. 3 to 5 are views showing modifications of the valve piece. Fig. 3 shows the case where an O-ring is used, Fig. 4 shows the case where the O-ring is used and a sub-piece is provided, Fig. 5 shows the case where the O-ring is provided on the main body side, and Fig. 6 shows the case where the O-ring is provided on the main body side. 8 are longitudinal sectional views of conventional valves, with FIG. 6 showing a bellows seal type, FIG. 7 showing a tire plum type, and FIG. 8 showing a manual cock type. 10...Main body, 11.11-1.11-21...Liquid contact surface, 12...
Inflow channel, 13.13-1.13-2... Outflow channel, 18... Penetration port, 20... Valve piece, 21... Lot part, 25... Operation rod, 26-126- 2... Pressing member, = 19 = 30.30-1.30-2... Diaphragm, 40.
40-1. ．． 40-2...Adhesion prevention member, 50.50
-1. ．． 50-2... Cover, 55... Flange, 60.60-1.60-2... Temperature detection means, S, S
l,,S2... Sealed space. Applicant: Daisou Semiconductor Equipment Co., Ltd.

Claims (1)

[Claims] (1) The main body has an inflow passage and an outflow passage, and facing liquid contact surfaces on both sides. A through hole for fitting a valve piece made of an oxide such as quartz is provided in the main body, and at least both liquid contact surfaces are made of quartz or the like. A pair of diaphragms made of fluorine-based heat-resistant rubber are provided, each forming a sealed space between the diaphragm and the liquid-contacting surface, and the diaphragm and the liquid-contacting surface are in direct contact within each sealed space. A valve characterized in that an anti-adhesive member made of an oxide such as quartz is disposed on each diaphragm, and a pair of pressing members for opening and closing the valve piece are disposed on the outside of each diaphragm.