JPH0440533U - - Google Patents
Info
- Publication number
- JPH0440533U JPH0440533U JP8217490U JP8217490U JPH0440533U JP H0440533 U JPH0440533 U JP H0440533U JP 8217490 U JP8217490 U JP 8217490U JP 8217490 U JP8217490 U JP 8217490U JP H0440533 U JPH0440533 U JP H0440533U
- Authority
- JP
- Japan
- Prior art keywords
- case
- robot body
- belt
- belt support
- dust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000003028 elevating effect Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8217490U JP2531292Y2 (ja) | 1990-08-03 | 1990-08-03 | 半導体製造装置の防塵構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8217490U JP2531292Y2 (ja) | 1990-08-03 | 1990-08-03 | 半導体製造装置の防塵構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0440533U true JPH0440533U (un) | 1992-04-07 |
| JP2531292Y2 JP2531292Y2 (ja) | 1997-04-02 |
Family
ID=31628747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8217490U Expired - Fee Related JP2531292Y2 (ja) | 1990-08-03 | 1990-08-03 | 半導体製造装置の防塵構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2531292Y2 (un) |
-
1990
- 1990-08-03 JP JP8217490U patent/JP2531292Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2531292Y2 (ja) | 1997-04-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |