JPH0440033U - - Google Patents
Info
- Publication number
- JPH0440033U JPH0440033U JP8304790U JP8304790U JPH0440033U JP H0440033 U JPH0440033 U JP H0440033U JP 8304790 U JP8304790 U JP 8304790U JP 8304790 U JP8304790 U JP 8304790U JP H0440033 U JPH0440033 U JP H0440033U
- Authority
- JP
- Japan
- Prior art keywords
- movable arm
- branch
- magnetic levitation
- magnetically
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005339 levitation Methods 0.000 claims description 4
Landscapes
- Non-Mechanical Conveyors (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990083047U JP2562958Y2 (ja) | 1990-08-04 | 1990-08-04 | 磁気浮上搬送装置の可動アーム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990083047U JP2562958Y2 (ja) | 1990-08-04 | 1990-08-04 | 磁気浮上搬送装置の可動アーム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0440033U true JPH0440033U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-04-06 |
| JP2562958Y2 JP2562958Y2 (ja) | 1998-02-16 |
Family
ID=31630392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990083047U Expired - Lifetime JP2562958Y2 (ja) | 1990-08-04 | 1990-08-04 | 磁気浮上搬送装置の可動アーム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2562958Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6045023A (ja) * | 1983-08-23 | 1985-03-11 | Shimada Phys & Chem Ind Co Ltd | プラズマ処理装置 |
| JPH01117041A (ja) * | 1987-10-29 | 1989-05-09 | Ulvac Corp | 真空中に於ける磁気浮上式交差搬送装置 |
-
1990
- 1990-08-04 JP JP1990083047U patent/JP2562958Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6045023A (ja) * | 1983-08-23 | 1985-03-11 | Shimada Phys & Chem Ind Co Ltd | プラズマ処理装置 |
| JPH01117041A (ja) * | 1987-10-29 | 1989-05-09 | Ulvac Corp | 真空中に於ける磁気浮上式交差搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2562958Y2 (ja) | 1998-02-16 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |