JPH0438134Y2 - - Google Patents

Info

Publication number
JPH0438134Y2
JPH0438134Y2 JP1987073885U JP7388587U JPH0438134Y2 JP H0438134 Y2 JPH0438134 Y2 JP H0438134Y2 JP 1987073885 U JP1987073885 U JP 1987073885U JP 7388587 U JP7388587 U JP 7388587U JP H0438134 Y2 JPH0438134 Y2 JP H0438134Y2
Authority
JP
Japan
Prior art keywords
valve
pilot
valve body
plunger
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987073885U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63182381U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987073885U priority Critical patent/JPH0438134Y2/ja
Publication of JPS63182381U publication Critical patent/JPS63182381U/ja
Application granted granted Critical
Publication of JPH0438134Y2 publication Critical patent/JPH0438134Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
JP1987073885U 1987-05-18 1987-05-18 Expired JPH0438134Y2 (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987073885U JPH0438134Y2 (pm) 1987-05-18 1987-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987073885U JPH0438134Y2 (pm) 1987-05-18 1987-05-18

Publications (2)

Publication Number Publication Date
JPS63182381U JPS63182381U (pm) 1988-11-24
JPH0438134Y2 true JPH0438134Y2 (pm) 1992-09-07

Family

ID=30918610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987073885U Expired JPH0438134Y2 (pm) 1987-05-18 1987-05-18

Country Status (1)

Country Link
JP (1) JPH0438134Y2 (pm)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101124182B1 (ko) * 2003-05-26 2012-03-28 댄포스 아/에스 진공 장치용 서보 밸브

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57132874U (pm) * 1981-02-16 1982-08-19

Also Published As

Publication number Publication date
JPS63182381U (pm) 1988-11-24

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