JPH0438039U - - Google Patents
Info
- Publication number
- JPH0438039U JPH0438039U JP8055290U JP8055290U JPH0438039U JP H0438039 U JPH0438039 U JP H0438039U JP 8055290 U JP8055290 U JP 8055290U JP 8055290 U JP8055290 U JP 8055290U JP H0438039 U JPH0438039 U JP H0438039U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- active region
- compound semiconductor
- region
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000001875 compounds Chemical class 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000012535 impurity Substances 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990080552U JP2523168Y2 (ja) | 1990-07-27 | 1990-07-27 | 化合物半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990080552U JP2523168Y2 (ja) | 1990-07-27 | 1990-07-27 | 化合物半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0438039U true JPH0438039U (sv) | 1992-03-31 |
JP2523168Y2 JP2523168Y2 (ja) | 1997-01-22 |
Family
ID=31625719
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990080552U Expired - Lifetime JP2523168Y2 (ja) | 1990-07-27 | 1990-07-27 | 化合物半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2523168Y2 (sv) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5382179A (en) * | 1976-12-27 | 1978-07-20 | Fujitsu Ltd | Field effect transistor |
JPS53119866U (sv) * | 1977-02-28 | 1978-09-22 | ||
JPS6233476A (ja) * | 1985-08-06 | 1987-02-13 | Nec Corp | 電界効果トランジスタおよびその製造方法 |
-
1990
- 1990-07-27 JP JP1990080552U patent/JP2523168Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5382179A (en) * | 1976-12-27 | 1978-07-20 | Fujitsu Ltd | Field effect transistor |
JPS53119866U (sv) * | 1977-02-28 | 1978-09-22 | ||
JPS6233476A (ja) * | 1985-08-06 | 1987-02-13 | Nec Corp | 電界効果トランジスタおよびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2523168Y2 (ja) | 1997-01-22 |
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